Title:
MICROMIRROR CHIP PACKAGING STRUCTURE, LASER APPARATUS, AND AUTOMOBILE
Document Type and Number:
WIPO Patent Application WO/2023/036269
Kind Code:
A1
Abstract:
Provided in the embodiments of the present application are a micromirror chip packaging structure, a laser apparatus, and an automobile, which relate to the field of micro-electro-mechanical technology. The present application is mainly used for providing a micromirror chip packaging structure that is capable of restraining the vibration amplitude of a micromirror chip. The micromirror chip packaging structure comprises a micromirror chip, and a first substrate and a second substrate which are stacked, wherein the micromirror chip is arranged on one side of the first substrate away from the second substrate; the micromirror chip comprises a frame, a movable component and a first torsion arm, wherein the movable component is connected to the frame through the first torsion arm; the first substrate comprises a vibration isolation platform, an elastic beam, and a support frame, wherein the micromirror chip is arranged on the vibration isolation platform, and the vibration isolation platform is connected to the support frame through the elastic beam; the support frame is fixedly connected to the second substrate, and a gap is formed between the vibration isolation platform and the second substrate; and the vibration isolation platform and the second substrate are both provided with a hollowed-out areas, and the hollowed-out areas are opposite the movable component. The micromirror chip packaging structure is a two-degrees-of-freedom system and is used for vibration isolation and improving the performance of the micromirror chip.
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Inventors:
WU JIAHAO (CN)
ZENG LI (CN)
ZHOU WU (CN)
ZENG LI (CN)
ZHOU WU (CN)
Application Number:
PCT/CN2022/117939
Publication Date:
March 16, 2023
Filing Date:
September 08, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G02B26/08; B81B7/02
Foreign References:
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| CN107539945A | 2018-01-05 | |||
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| CN112645274A | 2021-04-13 | |||
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| CN112909729A | 2021-06-04 | |||
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| CN202111063339A | 2021-09-10 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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