Title:
MICROMIRROR DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/215328
Kind Code:
A1
Abstract:
This micromirror device (1) is provided with a mirror part (12), a first actuator (14) that is disposed annularly around the mirror part (12), and reciprocatingly rotates the mirror part (12) about a first axis (a1), and a second actuator (16) that reciprocatingly rotates the mirror part (12) about a second axis (a2). When the resonant frequency of the lowest-order resonant mode that is a resonant mode in which the mirror part (12) and the first actuator (14) rotate in opposite phases to each other about the first axis (a1) is represented by A, the resonant frequency of the lowest-order resonant mode among resonant modes in which the mirror part (12) and the first actuator (14) vibrate in opposite phases in a direction orthogonal to both the first axis (a1) and the second axis (a2) is represented by B, and the frequency difference between the resonant frequency A and the resonant frequency B is represented by F = A-B, a resonant frequency C that is smaller than the frequency difference F and closest to the frequency difference F, and a resonant frequency D that is larger than the frequency difference F and closest to the frequency difference F satisfy F-C ≥ 20 Hz and F-D ≤ -150 Hz.
Inventors:
AOSHIMA KEISUKE (JP)
Application Number:
PCT/JP2021/015447
Publication Date:
October 28, 2021
Filing Date:
April 14, 2021
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08
Foreign References:
| JP2015184590A | 2015-10-22 | |||
| US20200057298A1 | 2020-02-20 | |||
| JP2017132281A | 2017-08-03 | |||
| JP2013114015A | 2013-06-10 | |||
| JP2020076928A | 2020-05-21 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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