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Title:
MICROPARRTICLE NUMBER DETECTOR
Document Type and Number:
WIPO Patent Application WO/2018/163661
Kind Code:
A1
Abstract:
This microparticle number detector 10 is provided with an electric charge generating element 20, a collecting device 40, and a number detecting device 50. The electric charge generating element 20 adds, to microparticles 16 in a gas, electric charges generated by electrical discharge to thereby convert the microparticles into charged microparticles P. The collecting device 40 collects, in a collecting electrode 42, the charged microparticles P that pass through between the collecting electrode 42 and a counter electrode 44 while performing Brownian motion. The number detecting device 50 detects the number of the microparticles 16 on the basis of a current varying according to the number of charged microparticles P collected by the collecting electrode 42. When the microparticles 16 or the like are deposited on the collecting electrode 42, a heater 60 burns and eliminates the deposits by heating the collecting electrode 42.

Inventors:
KANNO KEIICHI (JP)
MIZUNO KAZUYUKI (JP)
OKUMURA HIDEMASA (JP)
Application Number:
PCT/JP2018/002891
Publication Date:
September 13, 2018
Filing Date:
January 30, 2018
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G01N15/06; G01N27/60
Domestic Patent References:
WO2015146456A12015-10-01
Foreign References:
JPS53119094A1978-10-18
JP2015108578A2015-06-11
JP5906087B22016-04-20
JP2006194882A2006-07-27
JP2016169707A2016-09-23
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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