Title:
MICROPARTICLE COLLECTION SYSTEM AND MICROPARTICLE COLLECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/245870
Kind Code:
A1
Abstract:
In order to improve the efficiency of collecting microparticles on an object to be inspected, this invention: comprises a removing part (120) that removes microparticles on cargo by means of airflow generated by jetting compressed air from a jetting nozzle toward the object to be inspected, a collecting part (130) that collects the microparticles removed from the cargo by the removing part (120), and a charge-removing part (11) that removes static electricity from the surface of the object to be inspected; and is characterized in that the removing part (120) and the collecting part (130) are included at a subsequent stage to the charge-removing part (11).
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Inventors:
TAKADA YASUAKI (JP)
KUMANO SHUN (JP)
SHISHIKA TSUKASA (JP)
YOSHIOKA SHINJI (JP)
KUMANO SHUN (JP)
SHISHIKA TSUKASA (JP)
YOSHIOKA SHINJI (JP)
Application Number:
PCT/JP2020/022078
Publication Date:
December 09, 2021
Filing Date:
June 04, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N27/62; G01N1/02
Domestic Patent References:
| WO2009139744A1 | 2009-11-19 | |||
| WO2006097990A1 | 2006-09-21 |
Foreign References:
| JP2010264341A | 2010-11-25 |
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (JP)
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