Title:
MICROPARTICLE DETECTING ELEMENT AND MICROPARTICLE DETECTOR
Document Type and Number:
WIPO Patent Application WO/2018/163466
Kind Code:
A1
Abstract:
This microparticle detecting element is provided with: a case having a gas flow passage through which a gas flows; an electric charge generation part in which electric charges generated by discharge are added to the microparticles in the gas introduced into the case to thereby convert the microparticles into charged microparticles; a collecting electrode that is provided inside the case and collects collection targets which are either the charged microparticles or the electric charges not added to the microparticles; and a deceleration electrode which is disposed so that at least a portion thereof is spaced apart from an outer wall of the gas flow passage in the case, and which generates a deceleration electric field that decelerates the collection targets on at least one among an upstream side of the collection electrode with respect to the gas flow, and the collection electrode.
Inventors:
KANNO KEIICHI (JP)
MIZUNO KAZUYUKI (JP)
OKUMURA HIDEMASA (JP)
MIZUNO KAZUYUKI (JP)
OKUMURA HIDEMASA (JP)
Application Number:
PCT/JP2017/032101
Publication Date:
September 13, 2018
Filing Date:
September 06, 2017
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
G01N15/06; G01N27/60
Domestic Patent References:
| WO2015146456A1 | 2015-10-01 | |||
| WO2016080120A1 | 2016-05-26 |
Foreign References:
| JPH09112246A | 1997-04-28 | |||
| JP2011141209A | 2011-07-21 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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