Title:
MICROPLASMA GENERATION DEVICES AND ASSOCIATED SYSTEMS AND METHODS
Document Type and Number:
WIPO Patent Application WO/2014/026001
Kind Code:
A3
Abstract:
Microplasma generators and associated arrays and methods are described herein. Certain embodiments relate to a microplasma generator in which an elongated semiconductor structure can control electronic cun'ent supplied to a microplasma cavity. Plasmas can be created by supplying energy to a neutral gas so that free electrons and ions are created. In a thermal plasma, electrons, ions, and neutral atoms and/or molecules (referred to as "neutrals") are in thermal equilibtium
Inventors:
VELASQUEZ-GARCIA LUIS FERNANDO (US)
Application Number:
PCT/US2013/054138
Publication Date:
April 03, 2014
Filing Date:
August 08, 2013
Export Citation:
Assignee:
MASSACHUSETTS INST TECHNOLOGY (US)
International Classes:
H01J17/04
Foreign References:
| US20110140073A1 | 2011-06-16 | |||
| US20080129185A1 | 2008-06-05 | |||
| US20020164883A1 | 2002-11-07 | |||
| US20120045863A1 | 2012-02-23 |
Attorney, Agent or Firm:
OYER, Timothy, J. (Greenfield & Sacks P.C.,600 Atlantic Avenu, Boston MA, US)
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