Title:
MICROSCOPE APPARATUS AND OBJECTIVE LENS UNIT
Document Type and Number:
WIPO Patent Application WO/2018/070048
Kind Code:
A1
Abstract:
[Problem] To observe a sample with a high degree of accuracy. [Solution] This microscope apparatus comprises a pedestal, a support member positioned in a standing condition on the pedestal, and an objective lens unit supported by the support member and equipped with an objective lens support member for supporting the objective lens. The objective lens unit is equipped with a drive source for moving the objective lens support member up and down, and a drive mechanism for transmitting the drive force of the drive source to the objective lens support member.
Inventors:
AOYAMA KAZUMASA (JP)
Application Number:
PCT/JP2016/080619
Publication Date:
April 19, 2018
Filing Date:
October 14, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B21/00; G02B7/04; G02B7/16; G02B21/02
Foreign References:
| JPH1138326A | 1999-02-12 | |||
| JPH11344675A | 1999-12-14 | |||
| JP2014106291A | 2014-06-09 | |||
| JPH07120825A | 1995-05-12 | |||
| JPS59206812A | 1984-11-22 | |||
| US6239905B1 | 2001-05-29 |
Other References:
See also references of EP 3528028A4
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
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