Title:
MICROSCOPE SPECTROMETER, OPTICAL AXIS SHIFT CORRECTION DEVICE, SPECTROSCOPE AND MICROSCOPE USING SAME
Document Type and Number:
WIPO Patent Application WO/2012/070314
Kind Code:
A1
Abstract:
A microscope spectrometer for analyzing scattered light emitted by a sample, said light being incident to the microscope, when excitation light is directed from a light source onto the sample, is provided with: a first optical means for focusing the scattered light into a parallel beam; a first variable bandpass filter means having a variable transmitting wavelength range in which incident light is permitted to be penetrate, and through which, of the incident scattered light that has been focused into a parallel beam, light in the predetermined transmitting wavelength range is transmitted; a two-dimensional array light detection means for forming the scattered light in the transmitting wavelength range into images; and a control means for controlling the timing of the images of the two-dimensional array light detection means, and for changing the transmitting wavelength range of the first variable bandpass filter means in accordance with the timing.
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Inventors:
IGA MITSUHIRO (JP)
Application Number:
PCT/JP2011/072771
Publication Date:
May 31, 2012
Filing Date:
October 03, 2011
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP (JP)
IGA MITSUHIRO (JP)
IGA MITSUHIRO (JP)
International Classes:
G01N21/65; G01J3/26
Foreign References:
| JP2733491B2 | 1998-03-30 | |||
| JPH08178751A | 1996-07-12 | |||
| JP2000056230A | 2000-02-25 | |||
| JP2006528353A | 2006-12-14 | |||
| JP2011220700A | 2011-11-04 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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Claims: