Title:
MICROSCOPE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2017/099107
Kind Code:
A2
Abstract:
A microscope system includes a microscope body, a camera connected to an observation optical system of the microscope body, and an XY stage on which a slide of an observation object is placed and which is configured to move in an X-axis direction and a Y-axis direction that are orthogonal to each other. The XY stage includes an XY two-dimensional scale plate. The XY two-dimensional scale plate includes a first mark configured to provide X-axis direction axis information and Y-axis direction axis information of the stage, and a second mark which is provided within an observable region of the camera on the same plane as the first mark and which is available for recognizing a position of an XY plane of the first mark in a Z-axis direction at each of a plurality of points by focus detection of the camera.
Inventors:
SAKAMOTO MICHIIE (JP)
HASHIGUCHI AKINORI (JP)
MASUDA SHINOBU (JP)
SAKATA TSUGUHIDE (JP)
SHIMADA TSUTOMU (JP)
ANDO HIROTAKE (JP)
SAKAI AKIHIRO (JP)
HASHIGUCHI AKINORI (JP)
MASUDA SHINOBU (JP)
SAKATA TSUGUHIDE (JP)
SHIMADA TSUTOMU (JP)
ANDO HIROTAKE (JP)
SAKAI AKIHIRO (JP)
Application Number:
PCT/JP2016/086322
Publication Date:
June 15, 2017
Filing Date:
December 07, 2016
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G02B21/24; G02B21/26; G02B21/36
Foreign References:
| JP4600395B2 | 2010-12-15 | |||
| JP2014079401A | 2014-04-08 |
Attorney, Agent or Firm:
OHTSUKA, Yasunori et al. (JP)
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