MICROSCOPE-USE ADAPTOR AND MICROSCOPE DEVICE

Title:

MICROSCOPE-USE ADAPTOR AND MICROSCOPE DEVICE

Document Type and Number:

WIPO Patent Application WO/2006/093208

Kind Code:

A1

Abstract:

A microscope device for efficiently supplying/recovering liquid at observing by means of local immersion, the device comprising an object lens (22) in an immersion system, an ejecting means for ejecting liquid to between the tip end (51) of the object lens and a substrate, and a sucking means for sucking liquid. Inclined surfaces (52, 53) are provided surrounding the tip end of the object lens at two portions respectively adjacent to the tip end, and a protrusion (54) projecting from the inclined surfaces toward the object side of the object lens is provided at a portion adjacent to the inclines surfaces. One inclined surface (52) forms an opening that extends from the tip end to the side surface of the object lens and is surrounded at the side surface by the protrusion and the substrate. The ejecting means contains a tubular member (23) provided on the inclined surface (52) and uses the tubular member to eject liquid, the width of the tubular member being smaller than that of the inclined surface (52). The sucking means contains a tubular member (24) provided on the other inclined surface (53) and uses the tubular member (24) to suck liquid while sucking air through the opening, the width of the tubular member being larger than that of the tubular member (23).

Inventors:

KOMATSU MANABU (JP)
UCHIKAWA TOSHIO (JP)
SHIBATA HIROMASA (JP)

Application Number:

PCT/JP2006/303921

Publication Date:

September 08, 2006

Filing Date:

February 23, 2006

Export Citation:

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Assignee:

NIKON CORP (JP)
KOMATSU MANABU (JP)
UCHIKAWA TOSHIO (JP)
SHIBATA HIROMASA (JP)

International Classes:

G02B21/26

Foreign References:

JP2005083800A	2005-03-31
JP2005005713A	2005-01-06
JP2005019864A	2005-01-20
JPS5971737A	1984-04-23

Other References: