Title:
MICROSCOPIC ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/145422
Kind Code:
A1
Abstract:
Provided is a microscopic analysis device characterized by comprising: a focusing optical system 5 that focuses measurement light beams emitted from a sample 2 in a measurement region onto a first focal point; an aperture plate that has an opening 6 located at the first focal point; an elliptical concave mirror 8 that reflects the measurement light beams passing through the opening 6 and focuses the same onto a second focal point; a shielding plate that is positioned in front of the second focal point and in which is formed a through-hole 9a having an end surface with a shape that matches the cross-sectional shape of the measurement light beam flux at that position; and a light beam detector 9 that is provided at the second focal point. Thus, the microscopic analysis device allows many measurement light beams to enter the light beam detector while preventing light outside of the measurement region from entering the light beam detector.
Inventors:
OKUYAMA SHUHEI (JP)
Application Number:
PCT/JP2016/077673
Publication Date:
August 31, 2017
Filing Date:
September 20, 2016
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G02B17/08; G01N21/27; G02B17/06; G02B21/00
Foreign References:
| JP2001174708A | 2001-06-29 | |||
| JP2002188958A | 2002-07-05 | |||
| JPH10104522A | 1998-04-24 | |||
| JPH09274139A | 1997-10-21 |
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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