Title:
MICROSPECTROSCOPE
Document Type and Number:
WIPO Patent Application WO/2016/152823
Kind Code:
A1
Abstract:
Provided is a microspectroscope capable of performing a wide range of mapping measurements with high detection sensitivity, at high speed, and with high wavelength resolution. A Raman spectroscopy device that comprises: a means that linearly irradiates excitation light; a movable stage for samples; an objective lens that condenses Raman light from the linear irradiation area; an entrance slit provided at an image formation position for the Raman light; a spectrometer that disperses light that has passed through the entrance slit; a CCD detector that detects Raman spectral images; and a control device that synchronizes the movable stage and the CCD detector and controls mapping measurement. The control means is configured so as to: control the movable stage and move the linear irradiation area in a direction orthogonal to the longitudinal direction; and execute a CCD detector cycle during stage movement, so as to obtain one average spectrum for the movement range of the linear irradiation area in one optical detection cycle.
Inventors:
AIZAWA KENTO (JP)
INOUE TSUTOMU (JP)
USUKI MASATERU (JP)
INOUE TSUTOMU (JP)
USUKI MASATERU (JP)
Application Number:
PCT/JP2016/058889
Publication Date:
September 29, 2016
Filing Date:
March 22, 2016
Export Citation:
Assignee:
JASCO CORP (JP)
International Classes:
G01N21/65
Foreign References:
| JP2012189891A | 2012-10-04 | |||
| JP2014048088A | 2014-03-17 | |||
| JP2014507662A | 2014-03-27 |
Other References:
See also references of EP 3276336A4
Attorney, Agent or Firm:
IWAHASHI, YUJI (JP)
Yuji Iwahashi (JP)
Yuji Iwahashi (JP)
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