BACKGROUND OF INVENTION United States Patent Application S. N. 08/808,511, office docket P-358 MCW, filed February 27,1997, discloses a pneumatically controlled seating system in which an electronic control module selectively controls energization of a valve unit for controlling air flow from a pressure source to a plurality of pressurizable expandable fluid chambers or air cells.

The valve unit is a low energy consumption valve that is opened and closed by a valve actuator having a low consumption of power during operation of the system. One suitable valve for use in such systems is shown in United States Patent No. 5,447,286 wherein a piezo actuated vent valve is provided to control the air flow through the valve unit. The piezo actuation is provided by a

cantilevered member that has a layer of ceramic material bonded to a carrier plate. The ceramic material deforms when a voltage is imposed thereon by the control module. Deformation of the ceramic layer will deflect the carrier plate to open and close the valve.

Additionally, microvalves formed within silicon wafers are known as set- forth in United States Patent Nos. 4,826,131 ; 4,895,500; 5,909,078 and 5, 994,816. Such valves are characterized by low energy consumption and small size and by including a component that is responsive to an imposed condition to move in a manner that will control a valving element to open and close for controlling fluid flow, e. g., to a pressurizable expandable chamber.

One problem with systems for pneumatically contouring support surfaces such as vehicle seats, furniture seats and pneumatically controlled beds is how to interconnect valve control units with pressurized expandable chambers and with a pressure source in a compact and an efficient manner.

SUMMARY OF THE INVENTION The problem of providing a compactly arranged and easily assembled fluid flow controller for pneumatically contoured supports and such a controller having low energy consumption is addressed in the present invention by incorporating a microvalve formed on a silicon wafer and selectively combined with a controller to provide multiple flow paths to expandable fluid chambers or

air cells of a seating or body support system and including at least one microvalve controlled exhaust path from one or more expandable chambers or air cells.

One feature of the present invention is to provide a fluid flow controller of the aforesaid type in which a microvalve arrangement has a printed circuit board supporting a common manifold and one or more microvalves for supplying one or more expandable chambers or air cells.

A further feature is to provide such a fluid flow controller including a microvalve on the printed circuit board that is dedicated solely to providing an exhaust path from the common manifold when predetermined one or more of the expandable chambers or air cells are connected by one or more of the supply microvalves to the common manifold.

Yet another feature is to provide the common manifold as a single tube connected to a lock fitting on the microvalve.

Yet another feature is to provide a single tube connected to a pressure source.

Another feature of the present invention is to provide a fluid flow controller of the aforesaid type in which a first microvalve array includes a supply microvalve directly connected without the use of tubing to one of the expandable chambers or air cells and to a common manifold.

Still another feature is to commonly connect the microvalve to a pressure source and a common circuit board forming an assembly with a suitable controller for electrically connecting each of the microvalves and the pressure source for selectively or commonly pressurizing each of the expandable chambers or air cells during a pump up mode of operation.

Yet another feature is to provide such a microvalve array having an exhaust mode of operation from one or all of the expandable chambers or air cells provided by a microvalve exhaust valve that is connected to the common manifold and operated to exhaust one or more of the expandable chambers or air cells when the power supply to the pressure source is cut-off and one or more of the microvalves is opened in accordance with signals from the controller.

A further feature is to provide such an arrangement wherein a second array of supply microvalves are connected to a second plurality of expandable chambers or air cells and to a second common manifold having a source of pressure connected thereto and a second exhaust microvalve connected thereto and wherein the operation of the second array of supply microvalves, pump and exhaust microvalve is in accordance with a desired operating program that can be the same or different from that of the first microvalves.

Still another feature of the present invention is to provide such an arrangement having microvalve and pressurizable expandable chamber or air cell

connections wherein the microvalve is connected to be carried as part of the expandable chamber or air cell either externally or internally of the expandable chamber or air cell.

A still further feature of the present invention is to provide such an arrangement having a common single tube manifold for supply of pressurized fluid through a supply microvalve to one or more expandable chambers or cells and to provide an individual exhaust microvalve at each expandable chamber or cell or group of expandable chambers or cells defining a zone of more than one expandable chambers or cells.

Yet another feature of the present invention is to provide such an arrangement having a multi-functional microvalve module wherein all the supply microvalves are mounted on a common silicon wafer including a single inlet; a condition responsive region in the wafer to control flow to an outlet for supplying one or more expandable chambers or air cells and or to exhaust path from the one or more expandable chambers or air cells.

A further feature is to provide microvalve elements in such controllers wherein an actuator is provided that is condition responsive and operative to control a valve element to control fluid flow with respect to manifolds, expandable chambers and exhausts.

A still further feature is to provide the microvalve elements of the preceding object with a beam that is temperature responsive.

These and other features and objects will be more apparent with reference to the accompanying drawings wherein: BRIEF DESCRIPTION OF DRAWINGS Figure 1 is a diagrammatic view of a pneumatically operated system having expandable fluid chambers with a contoured support surface in a vehicle seat controlled by the fluid control system of the present invention; Figure 2 is a top elevational view of a microvalve, manifold and circuit board assembly in the fluid control system of the present invention; Figure 3 is a side elevational view of the assembly in Figure 2; Figure 4 is a diagrammatic view of a microvalve, partially sectioned; Figure 4A is a schematic top view of a preferred MEMS valve in a closed position with a mechanical latching mechanism in an engaged position; Figure 4B is a schematic top view of the valve of Figure 4A in the closed position with the latching mechanism in a disengaged position; Figure 4C is a schematic top view of the valve of Figure 4A in an open position with the latching mechanism in the disengaged position; Figure 4D is a schematic top view of the valve of Figure 4A in the open position with the latching mechanism in the engaged position; Figure 5 is a diagrammatic view of another embodiment of the invention

wherein a supply microvalve is directly connected by a bayonet type fitting to expandable fluid chamber (s) or air cell (s) of a pneumatically controlled contouring system; Figure 6 is a diagrammatic view showing a supply microvalve located internally of an expandable fluid chamber or cell; Figure 7 is a fragmentary diagrammatic view showing an individual exhaust microvalve for each zone; and Figure 8 is an elevational view of a multifunctional microvalve module embodiment of the invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENT OF THE INVENTION A series of air cells or bladders 1 are placed at strategic locations about the contour of an automotive seat 2 as shown in Figure 1. The air cell placement is selected to coincide with key pressure points on the body of an occupant of the seat.

In particular, plural cells 3 are positioned in the thoracic region while plural cells 4 are combined in the lumbar region. To further facilitate the adjustment of the seat, pairs of cells 5,6,7 and 8 are positioned at either side of the back and seat as well as the front and back of the thighs respectively. Each of these cells is in direct contact with the body to provide the control system with information, which may be related to the comfort of the user.

In addition to the pairs of cells that are provided to adjust the comfort of a user, in accordance with the present invention a plurality of air cells 9 are in the headrest and a plurality of air cells 10 are provided in the seat bottom.

The cells are connected to a source of pressurized fluid provided in part by a pump 12 through a manifold assembly 14 as shown in Figure 2. The manifold assembly 14 and pump 12 are operated by a controller 15 such as a microcomputer 16 in response to information stored in the microcomputer which is compared to data provided by a sensor 18. Alternatively, the controller 15 can be a switch arrangement that selectively controls valves (to be discussed) and a power supply for the pump 12.

Each individual cell is constructed of a suitable flexible material such as rubber, thermoplastic polyurethane-coated fabric or any other material provided with a fluid tight connection to the manifold to provide a path for conducting fluid into and out of the cell. The cells may be connected individually to the manifold or jointly with other cells. Individual spaced parallel cells 3,4,9,1. 0 are located for full body support and constitute a pneumatically operated system having expandable fluid chambers defining a contoured support surface.

While a vehicle seat is shown, such expandable fluid chambers can be used in beds, office furniture, household furniture and other occupant support systems having a support surface therein.

The seating or load support system can also be of the type shown in copending United States Patent Application 09/321, 235 filed May 27, 1999 and incorporated herein by reference and having a common assignee. It should be further understood that the invention as set-forth herein is equally suitable for use in any comfort support system that is contoured by changing the pressure within individual one or more of cells that define the support surface within the system.

The manifold assembly 14 includes microvalves 24a-24c connected to a common circuit board 25; a tube 27 is connected to a plurality of the microvalves 24 by bayonet type inlet fittings 26 thereon so as to support the tube 27 in spaced relationship to the circuit board 25.

As seen in Figure 4, each microvalve 24 includes an inlet or bayonet type fitting 26, and an outlet or bayonet type supply fitting 28. The microvalve includes a valve plate 29 movably supported on a microelectronic substrate 30.

The valve plate 29 is responsive to signals imposed across control lines 31 to assume a position across a valve opening 32 formed through the substrate 30 to open and close a passage 33 between the inlet 26 and the outlet 28. Such microvalves can be of the microelectromechanical systems or MEMS type disclosed, e. g., in U. S. Patent Nos. 5,909,078 and 5, 994,816 which are incorporated herein by reference. Such valves include a leaf, beam or other mechanical portion as an integrated component within a silicon chip manufactured by known silicon fabrication techniques. In the present application, the valve element is actuated to control fluid flow between the inlet 26 and outlet 28. Various actuation mechanisms are applicable in MEMS type control valves including magnetic, electrostatic, piezoelectric, differential pressure and thermal mechanisms. The mechanisms for operating the valving element can include materials that are shaped memory alloys or bi-metallic materials such as disclosed in our copending United States Serial No. 09/143, 784 filed August 31 1998. In the microvalves used in the assembly of Figure 2, and in other embodiments to be discussed, electrostatic, differential pressure, and thermal actuation mechanisms are used.

Preferably, the microvalve 24 includes a thermal arched beam electromechanical actuator of the type disclosed in U. S. Patent Nos. 5, 909,078 and 5,994,816. As shown schematically in Figures 4A through 4D, the preferred microvalve 24 and includes a silicon valve gate 34 including three rectangular grates 34a-c integrally interconnected in a spaced-apart disposition by a coupler bar 35. The grates 34a-c are slidably disposed over corresponding etched elongated through-holes 36 in the substrate 30. The gate 34 is movable between a normally closed position shown in Figures 4A and 4B and an open position shown in Figures 4C and 4D. In the closed position, the grates 34a-c close the through-holes 36 blocking air flow through the passage 33. In the open position,

the grates 34a-c are clear of the through-holes 36 allowing air to flow through the passage 33. A pair of silicon arched beams 37a, 37b are supported on the substrate 30 at respective opposite beam-ends in a perpendicular relationship 10 the coupler bar 35. The arched beams 37a, 37b are connected at their approximate centers to the coupler bar 35. When heated by passing electrical current through them, the beams 37a, 37b extend in length resulting in further arching and translational movement of the coupler bar 35 from the closed to the open position. When they are de-energized, the beams 37a, 37b return to their previous length and shape drawing the coupler bar 3 and gate 34 back to the closed position.

Preferably, the microvalve also includes two pairs of thermo-mechanical latches 39a, 39b supported on the substrate 30 immediately adjacent and laterally flanking an outer two grates 34a, 34c of the three grates 34a-c. Each latch of the two pairs of latches 39a, 39b includes a latch detent 45 shaped and positioned to engage a corresponding gate detent 47 on the outer two grates 34a, 34c. Each latch detent 45 is movable between an engaged position shown in Figures 4A and 4D and a disengaged position shown in Figures 4B and 4C. In their respective disengaged positions, the latch detents 45 allow the gate 34 to move between the open and closed positions. In their respective engaged positions, the latch detents 45 hold the gate 34 in either its open or closed position by engaging the respective gate detents 47. The latches 39a, 39b are actuated by passing electrical current through them. When electrical current is passed through the latches 39a, 39b, the narrower of two longitudinal parallel beams lengthens more than a thicker one of the two beams. This causes the latch detents 45 to pull away from and disengage the gate detents 47.

In operation, to open the microvalve 24, power is supplied to actuate the latches 39a, 39b which then release the gate 34 as shown in Figure 4B. The beams 37a, 37b are then energized to drive the coupler bar 35 and gate 34 to the open position. As shown in Figure 4C, in the open position, the grates 34a-c are

positioned clear of the through-holes 36. Power is then removed to de-activate the latches 39a, 39b which causes the latch detents 45 to engage the gate detents 47 thus holding the gate in the open position as shown in Figure 4D. is then removed from the beams 37a, 37b and the microvalve 24 remains in the open or"switched"state without power input.

To close the microvalve 24, power is supplied to actuate the latches 39a, 39b which then release the gate 34. The de-energized unheated beams 37a, 37b then pull the coupler bar 35 and gate 34 back to the closed position shown in Figure 4B. The latches 39a, 39b they are de-energized and re-engage and hold the gate 34 in the closed position.

As shown in Figure 2, the circuit board 25 is shown carrying a plurality of microvalves 24a-24b that have their inlets formed as bayonet type fittings 26 directed into a common manifold tube 26 so as to support the manifold tube 26 on the circuit board 25. Outlet fittings 28 are connected by tubing 28a to the various cells 1-10. The manifold tube 27 has an inlet end 27a connected to a suitable pressure source such as a pump as set-forth in the aforesaid'511 application. An exhaust microvalve 24c is connected to the manifold tube 27 and includes an inlet 26c, an outlet 28c and a moveable leaf 30c (as previously discussed) that opens and closes a passage through the exhaust microvalve 24c for exhausting the manifold to atmosphere through its outlet 28c.

As can be seen in Figure 3, the arrangement provides a compact control valve array that eliminates control wiring external of the envelope of a printed circuit board and enables a wide array of valves to be handled as a single unit for ease of assembly with respect to expandable chambers or air cells of a pneumatically controlled support system.

In other cases it might be desirable to contain the microvalves either as a direct connection to a cell internally or externally thereof. One such arrangement

is shown in Figure ure wherein a first array of supply microvalves 40a-40b in which each of the supply microvalves 40a, 40b has its outlet 41 directly connected to one of the expandable chambers or air cells 42, 44 and having their inlets 43 connected to a supply manifold tube 46 that is connected to a pressure source 48. A printed circuit board 50 with a suitable controller 52 (either on the board or separate) is electrically connected to each of the microvalves 40a, 40b and to the pressure source 48 for supplying power to the pressure source for selectively or commonly pressurizing each of the expandable chambers or air cells during a pump up mode. An exhaust mode from one or all of the expandable chambers or air cells is provided by a microvalve exhaust valve 53 that is connected to the common manifold tube 46 and operated to exhaust one or more of the expandable chambers or air cells when the power supply to the pressure source is cut-off and one or more of the microvalves is opened in accordance with signals from a controller 50a on the printed circuit board.

In the embodiment of Figure 5 one or more exhaust valves can be provided, as can one or more pumps or pressure sources. Thus, on the other side of the printed circuit board 50, (if desired) a second array of supply microvalves 40c, 40d is provided. The microvalves 40c, 40d are connected to a second plurality of expandable chambers or air cells 42a, 44a and to a second common manifold 54 having a source of pressure 56 connected thereto. A second exhaust microvalve 58 is connected to the manifold 54. The operation of the second array of supply microvalves, pump and exhaust microvalve is in accordance with a desired operating program that can be the same or different from that of the first array of supply microvalves.

In the embodiment of Figure, the electrical connection to the control module of the printed circuit board are direct from each of the control and exhaust valves as shown at connections 55 and 57.

While the microvalve and air cell connections are shown external, if desired, a microvalve 59 can be connected internally of an air cell 61 as shown in Figure 6.

In the embodiment shown in Figure 7, a common manifold 60 is provided for supply of pressurized fluid through a supply microvalve 62 to a cell 64 and an individual exhaust microvalve 66 can be provided at each cell or group of cells defining a zone of more than one cell.

In the embodiment shown in Figure 8, a multi-functional microvalve module 70 is shown wherein all the supply microvalves 72, 74 are mounted on the same silicon wafer including a single inlet 76. A pressure-sensing layer 78 is provided in the wafer to sense pressure in the module. A control area array 80 is provided on the wafer. A plurality of outlets 82-84 are provided from the module 70 for supplying one or more cells and or an exhaust outlet 86 from the one or more expandable chambers or air cells via passages (not shown) in the module for connecting one or more of the cells with atmosphere. In this embodiment, the common manifold is integral to the module. Pressure sensing is integral to the module and an open cell valve can be provided to read pressure. The output of the pressure sensor 78 is connected to the control area 80. The control area 80 can either pass the pressure signal to a main controller of the type shown in the'S 11 application. Alternatively, if the control area 80 is capable, e. g., has a comparator to compare the sensed pressure to a desired pressure control setting, the control area itself can be operative to open or close the valves to the expandable chambers or air cells based on the detected pressure. Furthermore, an output through control lines 90 may control either a remote or integral pump.