Title:
MICROVALVE AND METHOD OF MANUFACTURING THE SAME, MICROPUMP USING THE MICROVALVE AND METHOD OF MANUFACTURING THE SAME, AND APPARATUS USING THE MICROPUMP
Document Type and Number:
WIPO Patent Application WO/1997/005385
Kind Code:
A1
Abstract:
This invention provides a microvalve which is provided with an elastic diaphragm (13) moved vertically in accordance with the variation of pressure, a support base member (11) supporting the elastic diaphragm, retainer base plates (111, 12) retaining the support base member, and a valve seal-carrying valve projection (112) provided on the elastic diaphragm or retainer base plates and controlling a fluid, and which is formed so as to have a clearance (17) between the valve seal and elastic diaphragm when the microvalve is at rest, or a width (23, 31) of not more than 50 'mu'm of a contact portion of the valve seal with respect to the retainer base plates or elastic diaphragm, and a method of manufacturing the same; a micropump using this microwave and a method of manufacturing the same; and an apparatus using the micropump.
Inventors:
FUNASAKA TSUKASA (JP)
FUJIMORI TAKAYOSHI (JP)
MIYAZAKI HAJIME (JP)
FUJIMORI TAKAYOSHI (JP)
MIYAZAKI HAJIME (JP)
Application Number:
PCT/JP1996/002129
Publication Date:
February 13, 1997
Filing Date:
July 29, 1996
Export Citation:
Assignee:
SEIKO EPSON CORP (JP)
FUNASAKA TSUKASA (JP)
FUJIMORI TAKAYOSHI (JP)
MIYAZAKI HAJIME (JP)
FUNASAKA TSUKASA (JP)
FUJIMORI TAKAYOSHI (JP)
MIYAZAKI HAJIME (JP)
International Classes:
F04B43/02; F04B43/04; F04B53/10; F15C5/00; F16K99/00; (IPC1-7): F04B43/02
Domestic Patent References:
| WO1993020351A1 | 1993-10-14 |
Foreign References:
| JPH03505771A | 1991-12-12 | |||
| JPH05502079A | 1993-04-15 | |||
| JPH0466784A | 1992-03-03 |
Other References:
See also references of EP 0789146A4
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