MICROVALVE

WIPO Patent Application WO2002033268

A3

An improved microvalve device (300) is configured to provide a more robust and durable operation to withstand the demands of various operating environments. The microvalve may comprise a valve seat (302) and a diaphragm (304), with the diaphragm operated by an external actuator device (308), such as a bladder, through various mechanisms of actuation, such as direct and indirect mechanisms, that are separate from the microvalve. Through use of the various mechanisms of actuation, the actuator device is configured to apply forces on the diaphragm to suitably move the diaphragm to open and close the microvalve. The valve seat and diaphragm can be configured to provide the microvalve with a plurality of openings configured to permit flow thereinbetween. In addition, the microvalve may be configured to facilitate uni-directional or bi-directional flow. Further, a plurality of microvalves can be cascaded together in a parallel and/or series configuration, with each valve having similar or different flow characteristics, and being selectively operated. The microvalve can also include a combination gate valve configuration and a bladder configuration to provide high frequency response characteristics in addition to stability and reduction in leak flow.

KAO IMON
CASSAR THOMAS J
WONG ROBERT P

PCT/US2001/032594

November 21, 2002

October 18, 2001

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UNIV NEW YORK STATE RES FOUND (US)

F15C5/00; F16K99/00; (IPC1-7): F15C5/00

WO2000039467A1

2000-07-06

US5810325A	1998-09-22
US5541016A	1996-07-30
US5647574A	1997-07-15
US5161774A	1992-11-10
US5529279A	1996-06-25
US6129331A	2000-10-10
US6114794A	2000-09-05

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