Title:
MICROVALVE
Document Type and Number:
WIPO Patent Application WO2002070932
Kind Code:
A3
Abstract:
A microvalve for regulating a flow of fluid is provided. The microvalve (201) has a first plate (205), a second plate (215), a sealing membrane (217), a spacer membrane (219), a third plate (227), an actuation membrane (229) and a piston (221) or a ball (121).
Inventors:
DOFFING FRANK (DE)
KLAUS MICHAEL (DE)
SCHOENFELD FRIEDHELM (DE)
KLAUS MICHAEL (DE)
SCHOENFELD FRIEDHELM (DE)
Application Number:
PCT/EP2002/002482
Publication Date:
January 16, 2003
Filing Date:
March 06, 2002
Export Citation:
Assignee:
INST MIKROTECHNIK MAINZ GMBH (DE)
DOFFING FRANK (DE)
KLAUS MICHAEL (DE)
SCHOENFELD FRIEDHELM (DE)
DOFFING FRANK (DE)
KLAUS MICHAEL (DE)
SCHOENFELD FRIEDHELM (DE)
International Classes:
F15C5/00; F16K7/14; F16K27/00; F16K99/00; G01N30/20; (IPC1-7): F16K7/14; F16K31/126; F15C5/00
Domestic Patent References:
WO2001001105A1 | 2001-01-04 |
Foreign References:
US5863502A | 1999-01-26 | |||
US5653259A | 1997-08-05 | |||
US5145152A | 1992-09-08 | |||
US3613729A | 1971-10-19 | |||
FR2782935A1 | 2000-03-10 |
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