MICROVALVE

WIPO Patent Application WO/2018/235229

A1

In this invention, if a pneumatic fluid is supplied to a microvalve 1, a deforming section 33 of a diaphragm layer 3 deforms elastically and a moving section 34 of the diaphragm layer 3 adheres closely to a contact section 26 of a base layer 2. Then, a first internal opening 23 and a second internal opening 24 of the base layer 2 are closed by the moving section 34 of the diaphragm layer 3, closing a sample gas flow channel and putting the microvalve in a closed state. If a sample gas is supplied when a pneumatic fluid is not being supplied to the microvalve 1, the space between the moving section 34 of the diaphragm layer 3 and the contact section 26 of the base layer 2 widens, establishing a sample gas flow channel and putting the microvalve 1 in an open state. As a result, it is possible to open and close the first internal opening 23 and the second internal opening 24 without having a member-rotating mechanism in the microvalve 1. It is also possible to simplify the configuration of the mechanism for opening and closing the first internal opening 23 and the second internal opening 24 and to reduce the size of the microvalve 1.

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LU WENJIAN (JP)
SHIBAMOTO SHIGEAKI (JP)
TAKAHASHI KAZUNORI (JP)

PCT/JP2017/023035

December 27, 2018

June 22, 2017

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SHIMADZU CORP (JP)

B81B3/00; F16K7/17; G01N30/20

JP2009014010A	2009-01-22
JP2004291187A	2004-10-21
JP2006506239A	2006-02-23

YOSHIMOTO, Tsutomu et al. (JP)

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