Title:
MICROWAVE INTRODUCING APPARATUS AND PLASMA PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/148690
Kind Code:
A1
Abstract:
A microwave introducing apparatus (92) is provided with a planar antenna member (94)
whereupon a slot (96) is formed, and a slow-wave member (98), which is arranged on
the planar antenna member (94) and is composed of a dielectric material. At the
center part on an upper surface of the slow-wave member (98), a power feeding section
(100) protrudes. The power feeding section (100) is fitted in an outer conductor
(108B) of a coaxial waveguide tube (108). A center conductor (108A) of the coaxial
waveguide tube (108) is connected to the planar antenna member (94) through a
through hole arranged at the center of the power feeding section (100). A side
wall surface of the power feeding section (100) is vertical to an upper surface
of the slow-wave member (98). Since processing accuracy of the power feeding
section (100) composed of a material difficult to be processed is improved, generation
of a gap between the outer conductor (108B) and the power feeding section (100)
is eliminated, and troubles due to the gap, such as abnormal discharge, asymmetrical
electric field distribution, increase of microwave reflectance, are eliminated.
More Like This:
| JP6985758 | Plasma processing equipment |
| JP2005203166 | PLASMA TREATMENT METHOD AND PLASMA TREATMENT APPARATUS |
| JP6569578 | Plasma etching method |
Inventors:
TIAN CAIZHONG (JP)
ISHIBASHI KIYOTAKA (JP)
NOZAWA TOSHIHISA (JP)
YUASA TAMAKI (JP)
ISHIBASHI KIYOTAKA (JP)
NOZAWA TOSHIHISA (JP)
YUASA TAMAKI (JP)
Application Number:
PCT/JP2007/062324
Publication Date:
December 27, 2007
Filing Date:
June 19, 2007
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
TIAN CAIZHONG (JP)
ISHIBASHI KIYOTAKA (JP)
NOZAWA TOSHIHISA (JP)
YUASA TAMAKI (JP)
TIAN CAIZHONG (JP)
ISHIBASHI KIYOTAKA (JP)
NOZAWA TOSHIHISA (JP)
YUASA TAMAKI (JP)
International Classes:
H05H1/46; H01L21/3065
Foreign References:
| JP2002299314A | 2002-10-11 | |||
| JPH03191073A | 1991-08-21 |
Attorney, Agent or Firm:
YOSHITAKE, Kenji et al. (Room 323 Fuji Bldg.,2-3, Marunouchi 3-chome,Chiyoda-ku, Tokyo 05, JP)
Download PDF: