Title:
MICROWAVE PLASMA EMITTER DEVICE CAVITY RESONATOR
Document Type and Number:
WIPO Patent Application WO/2014/192062
Kind Code:
A1
Abstract:
Provided is a cavity resonator, comprising a conductive resonator main body (1), comprising an inner cavity (5) which is configured from a lateral wall (2) having a rectangular cross-section and an upper wall (3) and a lower wall (4) which respectively close an upper end aperture and a lower end aperture of the lateral wall (2). A microwave supply port (6) is disposed in the lateral wall, and a waveguide pipe (7) is connected to the microwave supply port via an inductivity window (13). Reaction pipe attachment ports (3a, 4a) are respectively disposed upon the upper wall and the lower wall. A reaction pipe (8) is attached to the reaction pipe attachment ports, connecting the top and bottom of the cavity, and extending at an intersection to the axis of the waveguide pipe. Rectangular tube parts (10a-10c) which are formed from a non-magnetic metal mesh are positioned nested along the same axis as the resonator main body (1) in locations spaced from the inner face of the lateral wall of the cavity interior and from the reaction pipe.
Inventors:
FUJII SHUITSU (JP)
OI KATSUMI (JP)
OI KATSUMI (JP)
Application Number:
PCT/JP2013/064641
Publication Date:
December 04, 2014
Filing Date:
May 27, 2013
Export Citation:
Assignee:
ADTEC PLASMA TECHNOLOGY CO LTD (JP)
International Classes:
H01P7/06; C23C16/511; H01L21/3065; H05H1/46
Foreign References:
| JPH01309972A | 1989-12-14 | |||
| JPH0262650U | 1990-05-10 |
Attorney, Agent or Firm:
MINORI Patent Profession Corporation (JP)
Patent business corporation Minori patent firm (JP)
Patent business corporation Minori patent firm (JP)
Download PDF: