Title:
MICROWAVE PLASMA GENERATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2003/037503
Kind Code:
A1
Abstract:
A microwave plasma generating apparatus, wherein a microwave matching device (3) comprised of a quartz case packed with a dielectric material exhibiting a high frequency dielectric loss of a low value is provided at the interior of the side A of a cavity (1) having an arbitrary shape and filled with an inert gas, and a microwave reflector (4) is also provided at the interior of the side B of the cavity (1), and further a quartz tube (5) is provided in the cavity (1), being arranged between and connected to metal tubes (6) and (7) which are in turn connected to the sides C and D of the cavity (1), respectively.
Inventors:
ANZAI SETSU (JP)
KATAYAMA HIDEO (JP)
KATAYAMA HIDEO (JP)
Application Number:
PCT/JP2001/009497
Publication Date:
May 08, 2003
Filing Date:
October 30, 2001
Export Citation:
Assignee:
ANZAI SETSU (JP)
KATAYAMA HIDEO (JP)
KATAYAMA HIDEO (JP)
International Classes:
H01J37/32; H05H1/46; (IPC1-7): B01J19/12; B01J19/08; H05H1/46
Domestic Patent References:
| WO1992022085A1 | 1992-12-10 |
Foreign References:
| US5902404A | 1999-05-11 | |||
| JPS63214346A | 1988-09-07 |
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