Title:
MICROWAVE PLASMA GENERATOR FOR DEPOSITION PROCESS EXHAUST GAS TRAP AND DEPOSITION PROCESS EXHAUST GAS TRAP COMPRSING SAME
Document Type and Number:
WIPO Patent Application WO/2019/194468
Kind Code:
A1
Abstract:
The present invention relates to a microwave plasma generator with improved productivity, which can be operated for a long time due to extended maintenance cycles, of a deposition process exhaust gas trap, and to a deposition process exhaust gas trap comprising same. The microwave plasma generator of a deposition process exhaust gas trap, according to an embodiment of the present invention, comprises: an outer conductor which is coupled to a waveguide into which microwaves are introduced, which has a space in which a plasma is formed, and into which a plasma gas is introduced; quartz for transmitting the microwaves introduced to the outer conductor from the waveguide; and an inner conductor which is disposed coaxially with the outer conductor inside the outer conductor, and is disposed at the rear side of the deposition process to introduce the exhaust gas after deposition.
Inventors:
KIM DAE WOON (KR)
JANG HYUN SEOK (KR)
LEE SUNG EUN (KR)
LEE BONG JU (KR)
JANG HYUN SEOK (KR)
LEE SUNG EUN (KR)
LEE BONG JU (KR)
Application Number:
PCT/KR2019/003616
Publication Date:
October 10, 2019
Filing Date:
March 28, 2019
Export Citation:
Assignee:
GREEN SCIENCE CO LTD (KR)
International Classes:
H01J37/32
Foreign References:
| KR20150139665A | 2015-12-14 | |||
| KR101557880B1 | 2015-10-13 | |||
| KR20120049968A | 2012-05-18 | |||
| KR101579139B1 | 2015-12-21 | |||
| KR20120139951A | 2012-12-28 |
Attorney, Agent or Firm:
KO, Young Kap (KR)
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