Title:
MICROWAVE PLASMA GENERATOR IMPROVED IN POWER TRANSMISSION EFFICIENCY
Document Type and Number:
WIPO Patent Application WO/2019/066431
Kind Code:
A1
Abstract:
The present invention relates to a microwave plasma generator improved in power transmission efficiency, which can compensate for impedance mismatching, due to plasma generated at one end of a coaxial cable of a microwave plasma generator, by changing the structure of a connection conductor electrically connecting an outer conductor and an inner conductor at the opposite end of the coaxial cable, thereby maximizing the efficiency of power transmission from a microwave power supply apparatus to the microwave plasma generator.
Inventors:
SIM JAE YOON (KR)
KWON SOON KU (KR)
KWON SOON KU (KR)
Application Number:
PCT/KR2018/011313
Publication Date:
April 04, 2019
Filing Date:
September 21, 2018
Export Citation:
Assignee:
POSTECH ACAD IND FOUND (KR)
International Classes:
H01J37/32
Foreign References:
| KR20100024685A | 2010-03-08 | |||
| KR20060134176A | 2006-12-27 | |||
| US5977715A | 1999-11-02 | |||
| JP2006104545A | 2006-04-20 | |||
| KR101044314B1 | 2011-06-29 |
Attorney, Agent or Firm:
LEE, Cheol Hee (KR)
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