Title:
MINIATURE BROADBAND TRANSDUCER
Document Type and Number:
WIPO Patent Application WO2002015636
Kind Code:
A3
Abstract:
Multiple embodiments of solid state micro-structures, such as a condenser microphone, are disclosed. According to one embodiment, the transducer a fixed perforated member, a freely movable diaphragm spaced from the perforated member, a support ring in the perforated member maintaining the proper spacing between the diaphragm and the perforated member near the perimeter; and compliant suspension springs allowing the diaphragm to rest freely on the support ring and yet mechanically decouples the diaphragm from the perforated member. According to another embodiment, a raised micro-structure is disclosed for use in a silicon based device. The raised micro-structure comprises a generally planar film having a ribbed sidewall supporting the film.
Inventors:
PEDERSEN MICHAEL (US)
LOEPPERT PETER V (US)
LEE SUNG BOK (US)
LOEPPERT PETER V (US)
LEE SUNG BOK (US)
Application Number:
PCT/US2001/025184
Publication Date:
October 24, 2002
Filing Date:
August 10, 2001
Export Citation:
Assignee:
KNOWLES ELECTRONICS LLC (US)
PEDERSEN MICHAEL (US)
LOEPPERT PETER V (US)
LEE SUNG BOK (US)
PEDERSEN MICHAEL (US)
LOEPPERT PETER V (US)
LEE SUNG BOK (US)
International Classes:
H04R19/04; B06B1/04; H04R19/00; H04R31/00; (IPC1-7): H04R19/00
Foreign References:
| EP0561566A2 | 1993-09-22 | |||
| US5452268A | 1995-09-19 | |||
| US4908805A | 1990-03-13 |
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