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Title:
MINIATURIZED DEVICE FOR MEASUREMENTS OF PRESSURE OVER A VERY WIDE RANGE, OF GAS CONCENTRATIONS AND RESIDUAL GAS ANALYSIS
Document Type and Number:
WIPO Patent Application WO/2015/114558
Kind Code:
A3
Abstract:
A miniaturized device 1 for pressure measurements over a very wide range and for gas concentration measurements is described. The device comprises at least one first electro-mechanical miniaturized sensor member 11 configured to detect a first pressure value P1 and generate a first electrical signal Si representative of the first pressure value P1, and further comprises an ionization-based detection member 19, configured to detect a second pressure value P2, and generate a second electrical signal S2 depending on the amount of ions detected and representative of the second pressure value P2. The ionization-based detection member 19 comprises an ionization source 21, an ionization region 20, ion extraction means 22 and at least one ion detector 23, configured to detect ions and generate the above-mentioned second electrical signal S2. The device 1 further comprises controlled flow opening/closing means 90, configured to control a fluidic communication between the ionization-based detection member 19 and an environment in which the first sensor member 11 is located. Also comprised in the device 1 are electronic processing means 10, operatively connected to said first sensor member 11 and to the ionization-based detection member 19, and configured to determine a measured pressure value P based on the first S1 and/or second S2 detected electrical signals. The electronic processing means 10 are further operatively connected to the controlled flow opening/closing means 90 and further configured to control the condition thereof. The device 1 finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to output the measured pressure value P. The first sensor member 11, the ionization-based detection member 19, the controlled flow opening/closing means 90, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.

Inventors:
MENSA, Gianpiero (Corso Re Umberto 65, Torino, I-10128, IT)
Application Number:
IB2015/050679
Publication Date:
November 17, 2016
Filing Date:
January 29, 2015
Export Citation:
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Assignee:
NANOTECH ANALYSIS S.R.L. (Corso Re Umberto 65, Torino, I-10128, IT)
International Classes:
G01L9/00; G01L15/00; G01L19/00; G01L21/34
Foreign References:
US20100024517A12010-02-04
US20070012116A12007-01-18
DE19853035A12000-05-25
EP2309241A12011-04-13
US5440931A1995-08-15
US6452167B12002-09-17
Attorney, Agent or Firm:
BRUNAZZI, Stefano et al. (Via Senato 8, Milano, I-20121, IT)
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