Title:
MINIATURIZED DEVICE FOR PRESSURE MEASUREMENTS OVER A VERY WIDE RANGE
Document Type and Number:
WIPO Patent Application WO/2015/114557
Kind Code:
A3
Abstract:
A miniaturized device 1 for pressure measurements over a very wide range is described. The device comprises at least one first electro-mechanical miniaturized sensor member 11, configured to detect a respective first pressure value P1 and generate a first electrical signal S1 representative of the first pressure value P1, and further comprises an ionization-based detection member 19, configured to detect a second pressure value P2, and generate a second electrical signal S2 depending on the amount of ions detected and representative of the second pressure value P2. The ionization-based detection member 19 comprises an ionization source 21, an ionization region 20, ion extraction means 22, and at least one ion detector 23, configured to detections. The device 1 further comprises electronic processing means 10, operatively connected to the first sensor member 11 and to the ionization-based detection member 19, and configured to determine a measured pressure value P based on the first S1 and second S2 detected electrical signals. The device 1 finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output the measured pressure value P. The first sensor member 11, the ionization-based detection member 19, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.
Inventors:
MENSA GIANPIERO (IT)
Application Number:
PCT/IB2015/050678
Publication Date:
November 17, 2016
Filing Date:
January 29, 2015
Export Citation:
Assignee:
NANOTECH ANALYSIS S R L S (IT)
International Classes:
G01L15/00; G01L9/00; G01L19/00; G01L21/34
Foreign References:
| US20070012116A1 | 2007-01-18 | |||
| US5440931A | 1995-08-15 | |||
| EP2309241A1 | 2011-04-13 | |||
| US6452167B1 | 2002-09-17 |
Attorney, Agent or Firm:
BRUNAZZI, Stefano et al. (Via Senato 8, Milano, IT)
Download PDF: