Title:
MIRROR ARRAY
Document Type and Number:
WIPO Patent Application WO/2012/130768
Kind Code:
A9
Abstract:
A mirror array (22) having a total surface extending perpendicularly to a surface normal (41), comprises a multiplicity of mirror elements (23) each having a reflection surface (36) and at least one degree of freedom of displacement, wherein the totality of the mirror elements (23) form a parqueting of a total reflection surface of the mirror array (22), and wherein the mirror array (22) is embodied modularly as a tile element in such a way that the parqueting of the total reflection surface can be extended by a tiling of a plurality of such mirror arrays (22).
Inventors:
WALDIS SEVERIN (CH)
LANI SEBASTIAN (CH)
KNAUF BENEDIKT (DE)
LANI SEBASTIAN (CH)
KNAUF BENEDIKT (DE)
Application Number:
PCT/EP2012/055239
Publication Date:
February 28, 2013
Filing Date:
March 23, 2012
Export Citation:
Assignee:
ZEISS CARL SMT GMBH (DE)
WALDIS SEVERIN (CH)
LANI SEBASTIAN (CH)
KNAUF BENEDIKT (DE)
WALDIS SEVERIN (CH)
LANI SEBASTIAN (CH)
KNAUF BENEDIKT (DE)
International Classes:
G02B7/18; G02B26/08; G03F7/20
Attorney, Agent or Firm:
RAU, SCHNECK & HÜBNER (Nürnberg, DE)
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