Title:
MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND IMAGE ACQUISITION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/183368
Kind Code:
A1
Abstract:
This mirror device 1 includes: a mirror 16 that is supported to pivot about a fast axis A1f and to pivot about a slow axis A2s, the mirror 16 having a first value which is the resonant frequency for pivoting about the fast axis A1f, and a second value which is the resonant frequency for pivoting about the slow axis A2s and is lower than the first value; a signal extraction unit 54 that acquires a synthesized signal N3, which includes an induced signal N4 generated in a slow axis coil 17s caused by the operation of the mirror 16 pivoting about the fast axis A1f, from the slow axis coil 17s and extracts the induced signal N4 from the synthesized signal N3;and a signal generation unit 50 that generates a fast axis drive signal N1 in accordance with the induced signal N4 so that the mirror 16 pivots about the fast axis A1f while resonating.
Inventors:
TAKAHASHI AKIRA (JP)
Application Number:
PCT/JP2017/010641
Publication Date:
October 26, 2017
Filing Date:
March 16, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/10; B81B1/00; G02B26/08
Foreign References:
| JP2015212784A | 2015-11-26 | |||
| JP2011107505A | 2011-06-02 | |||
| US20120236379A1 | 2012-09-20 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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