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Patent Searching and Data


Title:
MIRROR DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/031420
Kind Code:
A1
Abstract:
This mirror device is provided with a support section, a movable section (4), and a pair of torsion bars (7, 8) disposed on both sides of the movable section (4) on a first axis (X). The movable section (4) includes a frame (42) to which the pair of torsion bars (7, 8) are connected, and a mirror section (41) disposed inside the frame (42). The mirror section (41) is connected to the frame (42) at each of a pair of connecting regions (40a, 40b) located on both sides of the mirror section (41) in a direction parallel to a second axis (Y). Regions between the mirror section (41) and the frame (42), other than the pair of connecting regions (40a, 40b), are spaces. An outer edge of the mirror section (41) and an inner edge of the frame (42) are connected such that a curvature continues at each of the pair of connecting regions (40a, 40b) when viewed from a direction perpendicular to the first axis (X) and the second axis (Y).

Inventors:
SUZUKI DAIKI (JP)
OSAKI TAKUMA (JP)
Application Number:
PCT/JP2018/029301
Publication Date:
February 14, 2019
Filing Date:
August 03, 2018
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08
Foreign References:
US20130194555A12013-08-01
JP2007065649A2007-03-15
JP2016197265A2016-11-24
JP2012133242A2012-07-12
US7619802B22009-11-17
Other References:
See also references of EP 3667394A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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