MIRROR DRIVE DEVICE AND DRIVE METHOD THEREFOR

Title:

MIRROR DRIVE DEVICE AND DRIVE METHOD THEREFOR

Document Type and Number:

WIPO Patent Application WO/2016/052548

Kind Code:

A1

Abstract:

Provided are a mirror drive device and a drive method therefor which are capable of improving displacement efficiency and obtaining a sufficiently large displacement angle even when a sensor unit is provided. A piezoelectric actuator unit 16 for generating a drive force for rotating a mirror unit 12 around a rotational axis RA is equipped with a first actuator unit 30 and a second actuator unit 40 having double-supported structures having affixed end sections on both sides thereof in the axial direction of the rotational axis RA. The first actuator unit 30 has a first electrode part 51 and second electrode parts 52A, 52B. The second actuator unit 40 has third electrode parts 63A, 63B and a fourth electrode part 64. The arrangement of the electrode parts constituting an upper electrode corresponds to the stress distribution of the principal stress inside a piezoelectric body during resonant mode oscillations. Stress is produced in opposite directions by a piezoelectric body section corresponding to the locations of the first electrode part 51 and the third electrode parts 63A, 63B, and a piezoelectric body section corresponding to the locations of the second electrode parts 52A, 52B and the fourth electrode part 64.

Inventors:

NAONO TAKAYUKI (JP)

Application Number:

PCT/JP2015/077589

Publication Date:

April 07, 2016

Filing Date:

September 29, 2015

Export Citation:

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Assignee:

FUJIFILM CORP (JP)

International Classes:

G02B26/08; B81B3/00; G02B26/10; H01L41/09; H01L41/113; H01L41/187; H02N2/00

Domestic Patent References:

WO2012014666A1

2012-02-02

Foreign References:

JP2010197994A	2010-09-09
JP2010085506A	2010-04-15
JP2005128147A	2005-05-19
JP2012208352A	2012-10-25
JPH11112048A	1999-04-23

Other References: