Title:
MIST GENERATING DEVICE, FILM FORMING DEVICE, MIST GENERATING METHOD, FILM FORMING METHOD, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/154937
Kind Code:
A1
Abstract:
A mist generating device (MG1) for generating a mist (MT) including fine particles (NP) is provided with: a container (30a) for retaining a dispersion liquid (DIL) including the fine particles (NP); a first oscillating part (32a) for imparting oscillation at a first frequency to the dispersion liquid (DIL) in the container (30a) and thereby suppressing aggregation of the fine particles (NP) in the dispersion liquid (DIL); and a second oscillating part (34a) for imparting, to the dispersion liquid (DIL) in the container (30a), oscillation at a second frequency higher than the first frequency to generate a mist (MT) including the fine particles (NP) from the surface of the dispersion liquid (DIL).
Inventors:
NARA KEI (JP)
NISHI YASUTAKA (JP)
NAKAZUMI MAKOTO (JP)
IWAHORI KOICHIRO (JP)
YAMADA KENTARO (JP)
SUZUKI RYOKO (JP)
NISHI YASUTAKA (JP)
NAKAZUMI MAKOTO (JP)
IWAHORI KOICHIRO (JP)
YAMADA KENTARO (JP)
SUZUKI RYOKO (JP)
Application Number:
PCT/JP2017/009104
Publication Date:
September 14, 2017
Filing Date:
March 07, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B05B17/06; B05D1/02; B05D1/06; B05D1/32; B05D3/10; B05D5/12; B05D7/24; G03F7/20; H01B13/00; H01L21/027
Domestic Patent References:
| WO2015159983A1 | 2015-10-22 |
Foreign References:
| JPS5292116A | 1977-08-03 | |||
| JP2012057949A | 2012-03-22 | |||
| JP2007154156A | 2007-06-21 | |||
| JP2007229894A | 2007-09-13 | |||
| JP2008030026A | 2008-02-14 | |||
| JP2011235202A | 2011-11-24 | |||
| JP2013139000A | 2013-07-18 |
Attorney, Agent or Firm:
CHIBA Yoshihiro et al. (JP)
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