MIXER, AND DEVICE AND METHOD FOR MANUFACTURING THIN−FILM

Title:

MIXER, AND DEVICE AND METHOD FOR MANUFACTURING THIN−FILM

Document Type and Number:

WIPO Patent Application WO/2003/048413

Kind Code:

A1

Abstract:

A mixer (1) capable of uniformly mixing gases with different weights, a thin−film manufacturing device with the mixer (1), and a thin−film manufacturing method using film forming gas formed by mixing the gases in the mixer, the mixer (1) comprising a mixing chamber (2) having the gas inlets (5a, 6a) of two gas inlet pipes (5, 6) positioned so as to be opposed to each other and a mixing gas diffusion chamber (3), wherein a partition plate (4) is installed between the mixing chamber and the diffusion chamber so that the volume of the diffusion chamber is larger than that of the mixing chamber, and a gas outlet (7) is provided in the partition plate at a specified position on the vertical lower side of a straight line connecting two gas inlets to each other&semi the thin−film manufacturing device wherein a cylindrical sleeve member (61) is fitted to the side wall of a stage (53) inside a vacuum reaction chamber (2), and the height of the stage is set at a position where the volume of a second space on the lower side of the stage connected to a vacuum exhaust means is larger than that of a first space so that exhaust gas can be isotropically exhausted through a clearance between a sleeve member and the inside wall surface of the reaction chamber without causing convection in the first space between a gas head and the stage, whereby the gas flow of the mixing gas can be uniformized by suppressing the occurrence of turbulent flow, convection, and thermal convection.

Inventors:

YAMADA TAKAKAZU (JP)
MASUDA TAKESHI (JP)
KAJINUMA MASAHIKO (JP)
UEMATSU MASAKI (JP)
SUU KOUKOU (JP)

Application Number:

PCT/JP2002/012657

Publication Date:

June 12, 2003

Filing Date:

December 03, 2002

Export Citation:

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Assignee:

ULVAC INC (JP)
YAMADA TAKAKAZU (JP)
MASUDA TAKESHI (JP)
KAJINUMA MASAHIKO (JP)
UEMATSU MASAKI (JP)
SUU KOUKOU (JP)

International Classes:

B01F23/10; B01J4/00; B01J10/02; B01J19/24; C23C16/44; C23C16/455; C23C16/458; H01L21/00; (IPC1-7): C23C16/455; H01L21/31; B01J3/00; B01J3/02; B01F3/02

Foreign References:

JPH0545382Y2	1993-11-19
JPS5949829A	1984-03-22
JPH07211643A	1995-08-11
JP3081860B2	2000-08-28
JP2002001098A	2002-01-08
EP0537854A1	1993-04-21
US6312526B1	2001-11-06
JPH07150359A	1995-06-13
JPH02146423U	1990-12-12
JPH032377A	1991-01-08

Other References: