MIXTURE GAS SUPPLY DEVICE - FUJIKIN INCORPORATED

Title:

MIXTURE GAS SUPPLY DEVICE

Document Type and Number:

WIPO Patent Application WO/2011/101934

Kind Code:

A1

Abstract:

Disclosed is a mixture gas supply device for a semiconductor manufacturing device that prevents despread of other gas types toward the process gas supply line, and facilitates acceleration of gas exchange of the manifold and the process chamber of the mixture gas supply device. In a mixture gas supply device, a plurality of gas supply lines, comprising flow volume control devices and outlet-side switching valves (VO), are positioned in parallel arrangement, linking the gas outlets of each respective outlet-side switching valve (VO) to a manifold (1), and the gas supply line in a location near a mixed gas outlet of the manifold (1) is made so as to supply low flow volume gas. The outlet side of the flow volume control devices and the intake side of the outlet-side switching valves (VO) are linked in an airtight manner via mounts (19), further comprising flow volume control device outlet-side linking fittings (22) and gas paths (19a). Small hole portions (26) are disposed in some flow paths (24) upon the outlet-side linking fittings (22), and/or in flow paths (25) that communicates with the outlet-side switching valves (VO) and mixed gas flow through holes (20) of the manifold (1). It is possible to prevent despread of other gases to the upstream side of either the outlet-side switching valves (VO) or the flow volume control devices, and to rapidly substitute gas to the process chamber (6) that links to the mixed gas outlet (2) of the manifold (1).

More Like This:

JP62004315	SUSCEPTOR FOR VAPOR GROWTH APPARATUS
JP2011168870	FILM-DEPOSITION DEVICE AND MAINTENANCE METHOD
JP2006294900	PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, METHOD OF MANUFACTURING QUARTZ PRODUCT THEREIN, AND MEASURING FIXTURE

Inventors:

NAGASE, Masaaki (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
永瀬正明 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
DOHI, Ryousuke (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
土肥亮介 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)

Application Number:

JP2010/006261

Publication Date:

August 25, 2011

Filing Date:

October 22, 2010

Export Citation:

Click for automatic bibliography generation Help

Assignee:

FUJIKIN INCORPORATED (3-2 Itachibori 2-chome, Nishi-ku Osaka-sh, Osaka 12, 〒5500012, JP)
株式会社フジキン (〒12 大阪府大阪市西区立売堀２丁目３番２号 Osaka, 〒5500012, JP)
NAGASE, Masaaki (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)
永瀬正明 (〒12 大阪府大阪市西区立売堀２丁目３番２号株式会社フジキン内 Osaka, 〒5500012, JP)
DOHI, Ryousuke (3-2 Itachibori 2-chome, Nishi-ku, Osaka-sh, Osaka 12, 〒5500012, JP)

International Classes:

H01L21/205; B01J4/00; C23C16/455; F17D1/04

Attorney, Agent or Firm:

SUGIMOTO, Takeo et al. (Kitahama-Gate Bldg, 1-21 Kitahama 2-chome, Chuo-ku, Osaka-sh, Osaka 41, 〒5410041, JP)

Download PDF:

View/Download PDF PDF Help

Claims:

Previous Patent: METHOD FOR PRODUCING STEREOGRAPH IMAGE FOR DISPLAY SCREEN PROTECTION SHEET AND SHEET THEREBY

Next Patent: SOLID-STATE IMAGE PICKUP ELEMENT AND METHOD FOR MANUFACTURING SAME