Title:
MO-W TARGET AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2013/038668
Kind Code:
A1
Abstract:
[Problem] To provide a Mo-W target capable of improving relative density without performing a rolling process, and a method for manufacturing the Mo-W target. [Solution] A molybdenum powder is subjected to a deoxidation process at a temperature of 1100 to 1300°C inclusive, tungsten powder is mixed with the deoxidized molybdenum powder, and the mixture of the molybdenum powder and the tungsten powder is sintered under pressure at a predetermined temperature. As a consequence thereof, fewer voids are generated during sintering, and the density of sintered bodies is increased. Therefore, the abovementioned manufacturing method makes it possible to achieve higher densities without performing a rolling process, making it possible to achieve uniform film thickness when sputtering is used to form a film.
Inventors:
MA WENPING (JP)
MATSUMOTO HIROSHI (JP)
NITTA JUNICHI (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
SAKAMOTO JUNICHI (JP)
MATSUMOTO HIROSHI (JP)
NITTA JUNICHI (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
SAKAMOTO JUNICHI (JP)
Application Number:
PCT/JP2012/005812
Publication Date:
March 21, 2013
Filing Date:
September 13, 2012
Export Citation:
Assignee:
ULVAC INC (JP)
MA WENPING (JP)
MATSUMOTO HIROSHI (JP)
NITTA JUNICHI (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
SAKAMOTO JUNICHI (JP)
MA WENPING (JP)
MATSUMOTO HIROSHI (JP)
NITTA JUNICHI (JP)
KIYOTA JUNYA (JP)
TAKEI MASAKI (JP)
SAKAMOTO JUNICHI (JP)
International Classes:
C23C14/34; B22F1/00; B22F3/15; C22C27/04
Foreign References:
JP2000045066A | 2000-02-15 | |||
JP2004217990A | 2004-08-05 | |||
JP2008280570A | 2008-11-20 | |||
JP2005307225A | 2005-11-04 |
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
Omori Junichi (JP)
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