Title:
MOBILE BODY DRIVING METHOD, MOBILE BODY DRIVING SYSTEM, PATTERN FORMING METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/029758
Kind Code:
A1
Abstract:
A controller tilts a mobile body at an angle of (α) from an XY flat surface
in a periodic direction of gratings (39Y1, 39Y2), based
on a measurement value obtained from an interferometer which measures a tilt
angle of the mobile body (WST) from the XY surface. Then, based on the measurement
values obtained from encoder systems (62A, 62C) before and after tilting and
information of the angle (α), the controller calculates a quantity fluctuated
from the Abbe's number of the grating surface to a reference surface (for
instance, an image surface of a projection optical system) to be a positional
control reference of the mobile body within the XY flat surface. Then, the controller
drives the mobile body along the XY flat surface, based on the positional information,
which is of the mobile body within the XY flat surface and measured by the encoder
system, and on an encoder system measurement error corresponding to the mobile
body tilt angle from the XY surface due to the quantity fluctuated from the Abbe's
number on the grating surface.
Inventors:
SHIBAZAKI, Yuichi (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
Application Number:
JP2007/067124
Publication Date:
March 13, 2008
Filing Date:
September 03, 2007
Export Citation:
Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 31, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内３丁目２番３号 Tokyo, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内３丁目２番３号 Tokyo, 1008331, JP)
International Classes:
H01L21/027; G01B11/00; G01B11/26; G03F7/20; H01L21/68
Attorney, Agent or Firm:
TATEISHI, Atsuji (TATEISHI & CO, Karakida Center Bldg.1-53-9, Karakida, Tama-shi, Tokyo 35, 2060035, JP)
Download PDF: