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Title:
MOBILE BODY DRIVING METHOD, MOBILE BODY DRIVING SYSTEM, PATTERN FORMING METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2008/029758
Kind Code:
A1
Abstract:
A controller tilts a mobile body at an angle of (α) from an XY flat surface in a periodic direction of gratings (39Y1, 39Y2), based on a measurement value obtained from an interferometer which measures a tilt angle of the mobile body (WST) from the XY surface. Then, based on the measurement values obtained from encoder systems (62A, 62C) before and after tilting and information of the angle (α), the controller calculates a quantity fluctuated from the Abbe's number of the grating surface to a reference surface (for instance, an image surface of a projection optical system) to be a positional control reference of the mobile body within the XY flat surface. Then, the controller drives the mobile body along the XY flat surface, based on the positional information, which is of the mobile body within the XY flat surface and measured by the encoder system, and on an encoder system measurement error corresponding to the mobile body tilt angle from the XY surface due to the quantity fluctuated from the Abbe's number on the grating surface.

Inventors:
SHIBAZAKI YUICHI (JP)
Application Number:
PCT/JP2007/067124
Publication Date:
March 13, 2008
Filing Date:
September 03, 2007
Export Citation:
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Assignee:
NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)
International Classes:
H01L21/027; G01B11/00; G01B11/26; G03F7/20; H01L21/68
Domestic Patent References:
WO2006038952A22006-04-13
WO1999049504A11999-09-30
WO2004053955A12004-06-24
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WO1999060361A11999-11-25
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JP2002151405A2002-05-24
JPH07190741A1995-07-28
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Other References:
See also references of EP 2071614A4
Attorney, Agent or Firm:
TATEISHI, Atsuji (Karakida Center Bldg.1-53-9, Karakida, Tama-shi, Tokyo 35, JP)
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