Title:
MOBILE BODY SYSTEM, EXPOSURE APPARATUS, AND METHOD OF PRODUCING DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/057263
Kind Code:
A1
Abstract:
Stopper mechanisms (48A, 48B) prevent a wafer table (WTB) and a measurement table (MTB) from approaching each other closer than a predetermined distance, and a drive mechanism (34A) can cancel the prevention. As a consequence, for example, when stationary members (81, 80) are driven independently, the stopper mechanisms can prevent the tables from coming into contact with each other even if either of them is runaway. This enables, when the tables are set closer to each other than the predetermined distance, the prevention by the stopper mechanisms to be cancelled by a cancellation mechanism, enabling both tables to be closer without interference by the stopper mechanisms.
Inventors:
YODA YASUSHI (JP)
SHIBAZAKI YUICHI (JP)
ARAI DAI (JP)
SHIBAZAKI YUICHI (JP)
ARAI DAI (JP)
Application Number:
PCT/JP2005/021512
Publication Date:
June 01, 2006
Filing Date:
November 24, 2005
Export Citation:
Assignee:
NIKON CORP (JP)
YODA YASUSHI (JP)
SHIBAZAKI YUICHI (JP)
ARAI DAI (JP)
YODA YASUSHI (JP)
SHIBAZAKI YUICHI (JP)
ARAI DAI (JP)
International Classes:
H01L21/027; G03F9/00; G12B5/00; H01L21/68
Domestic Patent References:
| WO2002019401A1 | 2002-03-07 |
Foreign References:
| JP2001223159A | 2001-08-17 | |||
| JP2004040106A | 2004-02-05 | |||
| JP2001217183A | 2001-08-10 | |||
| JP2005005295A | 2005-01-06 |
Other References:
See also references of EP 1840943A4
None
None
Attorney, Agent or Firm:
Tateishi, Atsuji (Karakida Center Bldg. 1-53-9, Karakida, Tama-sh, Tokyo 35, JP)
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