Title:
MOBILE DEVICE, EXPOSURE DEVICE, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, METHOD FOR MANUFACTURING DEVICE, AND MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/057465
Kind Code:
A1
Abstract:
A measurement system for finding Z-axis direction position information about a substrate holder (36) that can be moved in a direction parallel to an X-Y plane is provided with: a Y slider (76) provided opposite the substrate holder (36), the Y slider being capable of moving in the Y-axis direction in synchronization with the substrate holder (36); a sensor head (78) provided on the Y slider (76); and a control system for controlling the Y slider (76), and for finding Z-axis direction position information about the substrate holder (36) via the sensor head (78) by using a target (38) provided to the substrate holder (36), the target (38) extending in the X-axis direction.
Inventors:
AOKI YASUO (JP)
Application Number:
PCT/JP2016/078636
Publication Date:
April 06, 2017
Filing Date:
September 28, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G03F7/20; H01L21/68
Domestic Patent References:
| WO2014054690A1 | 2014-04-10 | |||
| WO2013150788A1 | 2013-10-10 | |||
| WO2009028157A1 | 2009-03-05 | |||
| WO2008026742A1 | 2008-03-06 |
Foreign References:
| JP2012227551A | 2012-11-15 | |||
| JP2006156508A | 2006-06-15 | |||
| JP2003100627A | 2003-04-04 | |||
| JP2001004357A | 2001-01-12 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (JP)
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