Title:
MOBILE OBJECT DRIVING METHOD, MOBILE OBJECT DRIVING SYSTEM, PATTERN FORMING METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD AND CALIBRATION METHOD
Document Type and Number:
WIPO Patent Application WO/2008/029757
Kind Code:
A1
Abstract:
Positional information of a stage (WST) within an XY flat surface is measured
by a controller by using three encoders (Enc1, Enc2, Enc3) including at least
each of an X encoder and a Y encoder of an encoder system. The stage (WST) is driven
within the XY flat surface, based on the measurement results of the positional
information and positional information (p1, q1), (p2,
q2) and (p3, q3) within a surface parallel to the
XY flat surface of the heads (encoders) (Enc1, Enc2, Enc3), which are used for
the positional information measurement. Thus, stage shift can be accurately
controlled by switching the heads (encoders) for controlling the stage (WST)
while the stage is shifted, by using the encoder system which includes a plurality
of the heads.
Inventors:
SHIBAZAKI, Yuichi (2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 31, 1008331, JP)
Application Number:
JP2007/067123
Publication Date:
March 13, 2008
Filing Date:
September 03, 2007
Export Citation:
Assignee:
NIKON CORPORATION (2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo, 31, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内３丁目２番３号 Tokyo, 1008331, JP)
株式会社ニコン (〒31 東京都千代田区丸の内３丁目２番３号 Tokyo, 1008331, JP)
International Classes:
H01L21/027; G01B11/00; G01B11/26; G03F7/20
Attorney, Agent or Firm:
TATEISHI, Atsuji (TATEISHI & CO, Karakida Center Bldg.1-53-9, Karakida, Tama-shi, Tokyo 35, 2060035, JP)
Download PDF: