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Title:
MOBILE OBJECT DRIVING METHOD, MOBILE OBJECT DRIVING SYSTEM, PATTERN FORMING METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD AND CALIBRATION METHOD
Document Type and Number:
WIPO Patent Application WO/2008/029757
Kind Code:
A1
Abstract:
Positional information of a stage (WST) within an XY flat surface is measured by a controller by using three encoders (Enc1, Enc2, Enc3) including at least each of an X encoder and a Y encoder of an encoder system. The stage (WST) is driven within the XY flat surface, based on the measurement results of the positional information and positional information (p1, q1), (p2, q2) and (p3, q3) within a surface parallel to the XY flat surface of the heads (encoders) (Enc1, Enc2, Enc3), which are used for the positional information measurement. Thus, stage shift can be accurately controlled by switching the heads (encoders) for controlling the stage (WST) while the stage is shifted, by using the encoder system which includes a plurality of the heads.

Inventors:
SHIBAZAKI YUICHI (JP)
Application Number:
PCT/JP2007/067123
Publication Date:
March 13, 2008
Filing Date:
September 03, 2007
Export Citation:
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Assignee:
NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)
International Classes:
H01L21/027; G01B11/00; G01B11/26; G03F7/20
Domestic Patent References:
WO2006038952A22006-04-13
WO1999049504A11999-09-30
WO2004053955A12004-06-24
WO2003065428A12003-08-07
WO1999060361A11999-11-25
WO2005124834A12005-12-29
WO2005074014A12005-08-11
WO1998040791A11998-09-17
WO2004107011A12004-12-09
WO1999046835A11999-09-16
WO2001035168A12001-05-17
Foreign References:
JPH04265805A1992-09-22
JPS63292005A1988-11-29
JPH07190741A1995-07-28
JPH03167419A1991-07-19
JP2002090114A2002-03-27
JPH07270122A1995-10-20
JPH05129184A1993-05-25
JP2002151405A2002-05-24
JP2004101362A2004-04-02
JP2005308592A2005-11-04
JP2001313250A2001-11-09
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JPS57117238A1982-07-21
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JPH1116816A1999-01-22
US20020061469A12002-05-23
JPH06283403A1994-10-07
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JPS6144429A1986-03-04
JPH10214783A1998-08-11
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JP2004519850A2004-07-02
US6611316B22003-08-26
Other References:
See also references of EP 2071613A4
Attorney, Agent or Firm:
TATEISHI, Atsuji (Karakida Center Bldg.1-53-9, Karakida, Tama-shi, Tokyo 35, JP)
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