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Patent Searching and Data


Title:
MOBILE POSITION CONTROL DEVICE AND STAGE DEVICE USING THIS CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/111754
Kind Code:
A1
Abstract:
A mobile position control device (60) comprising a coordinates conversion block (70), a translating direction control system (80) for feedback-controlling a Y1 linear motor (20A), a yawing direction control system (90) for feedback-controlling a Y2 linear motor (20B), and a thrust non-interfering block (100). Since estimated disturbance components are removed from a Y-direction translating thrust instruction value uy and a Ѳ-direction thrust instruction value uѲ respectively by a translating disturbance observer (82) and a rotating disturbance observer (92) even if a translating direction disturbance d1, and rotating direction disturbance d2 are input to the translating direction control system (80) and the yawing direction control system (90) respectively, linear motors (20A, 20B) can generate disturbance-unaffected drive forces F1, F2 respectively.

Inventors:
SAKO DAISUKE (JP)
Application Number:
PCT/JP2005/008367
Publication Date:
November 24, 2005
Filing Date:
May 06, 2005
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
SAKO DAISUKE (JP)
International Classes:
G05B19/19; G05D3/00; B23Q1/58; H02P5/74; (IPC1-7): G05D3/00; B23Q1/58
Foreign References:
JP2001022448A2001-01-26
JP2002049425A2002-02-15
Attorney, Agent or Firm:
Itoh, Tadahiko (Yebisu Garden Place Tower 20-3, Ebisu 4-chom, Shibuya-Ku Tokyo 32, JP)
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