Title:
MOBILITY ANALYZER
Document Type and Number:
WIPO Patent Application WO/2022/219825
Kind Code:
A1
Abstract:
A mobility analyzer 1 comprises: a pair of filter electrodes 21, 22 that can allow the passage of charged particles having a prescribed mobility; an adjustment electrode pair 33 that has a capturing electrode 34 and a deflecting electrode 35 disposed in a facing manner, and that can deflect the advancing direction of charged particles passing between the capturing electrode 34 and the deflecting electrode 35; and a control unit 40 that applies a voltage to each of the pair of filter electrodes 21, 22 and the adjustment electrode pair 33. The control unit 40 comprises: a configuration in which an asymmetrical periodic voltage is positively and negatively applied between the pair of filter electrodes 21, 22; and a configuration in which the ratio of charged particles to be captured by the capturing electrode 34 to the amount of charged particles to be introduced between the electrodes of the adjustment electrode pair 33 is changed by periodically applying a voltage between the electrodes of the adjustment electrode pair 33.
Inventors:
KOSAKA TOMOHIRO
ABEYSINGHE RESHAN MADUKA
TERANISHI TOMOKO
ABEYSINGHE RESHAN MADUKA
TERANISHI TOMOKO
Application Number:
PCT/JP2021/015785
Publication Date:
October 20, 2022
Filing Date:
April 16, 2021
Export Citation:
Assignee:
SHARP DISPLAY TECHNOLOGY CORP (JP)
International Classes:
G01N27/624
Domestic Patent References:
| WO2015008371A1 | 2015-01-22 |
Foreign References:
| US20090189064A1 | 2009-07-30 | |||
| US20100243883A1 | 2010-09-30 | |||
| US20050205775A1 | 2005-09-22 | |||
| JP2004529461A | 2004-09-24 | |||
| JP2019121509A | 2019-07-22 |
Attorney, Agent or Firm:
AKATSUKI UNION PATENT FIRM (JP)
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