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Title:
MODAL LOCALIZATION EFFECT-BASED WEAK MAGNETIC FIELD MEASUREMENT DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2020/253795
Kind Code:
A1
Abstract:
Disclosed are a high-sensitivity magnetic field measurement method and a device, pertaining to the field of electronic measurement instruments. The invention comprises a magnetic field measurement chip and a processing method for a test signal. The chip comprises no less than two weakly coupled resonators, a drive electrode, detection electrodes, a grid structure at an outer side. An alternating current is applied to the weakly coupled resonators by the drive electrode. When the chip is placed into a vertical magnetic field, the resonators are subjected to a changing Lorentz force and generate a harmonic oscillation. When the external magnetic field is changed, the oscillation state of the resonators changes accordingly. A direct current is applied to the grid structure, which is then subjected to a horizontal Lorentz force, changing the electrostatic negative stiffness between the grid structure and the weakly coupled resonators, such that a significant imbalance arises in the energy distribution of a system of the weakly coupled resonators. The invention provides two sets of detection electrodes at two sides of an output resonator, thereby achieving differential amplitude detection with a single resonator, eliminating interference of a feed-through capacitor, and achieving high-sensitivity measurements of a weak magnetic field strength by means of measuring an amplitude difference of resonators. The invention achieves real-time measurements of a weak magnetic field and has strong interference resistance, thereby providing superior practical value.

Inventors:
CHANG HONGLONG (CN)
LI WENMU (CN)
YAN ZIMU (CN)
YE FANG (CN)
Application Number:
PCT/CN2020/096896
Publication Date:
December 24, 2020
Filing Date:
June 18, 2020
Export Citation:
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Assignee:
UNIV NORTHWESTERN POLYTECHNICAL (CN)
International Classes:
G01R33/02; B81B3/00; G01P15/097
Domestic Patent References:
WO2002088764A12002-11-07
WO2007128096A12007-11-15
Foreign References:
CN110542869A2019-12-06
CN109655674A2019-04-19
CN101475139A2009-07-08
CN107643423A2018-01-30
CN108344900A2018-07-31
CN1886669A2006-12-27
CN102116851A2011-07-06
CN106199463A2016-12-07
CN108761134A2018-11-06
CN1588109A2005-03-02
CN101515026A2009-08-26
CN101320081A2008-12-10
CN102759720A2012-10-31
US6597048B12003-07-22
Other References:
PALA, SEDAT ET AL.: "A Lorentz force MEMS magnetometer", 2016 IEEE SENSORS, 9 January 2017 (2017-01-09), XP033036792, DOI: 20200806222418Y
AZGIN, K ET AL.: "The effects of tine coupling and geometrical imperfections on the response of DETF resonators", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 30 October 2013 (2013-10-30), XP020254191, DOI: 20200806224245
ZHANG, HEMIN ET AL.: "A High-Sensitivity Micromechanical Electrometer Based on Mode Localization of Two Degree-of-Freedom Weakly Coupled Resonators", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 25, no. 5, 31 October 2016 (2016-10-31), XP011624557, ISSN: 1057-7157, DOI: 20200806223301A
KANG, HAO ET AL.: "A Mode-localized Accelerometer based on Three Degree-of-freedom Weakly Coupled Resonator", 2017 IEEE SENSORS, 25 December 2017 (2017-12-25), XP033281297, DOI: 20200806224850A
Attorney, Agent or Firm:
NORTHWESTERN POLYTECHNICAL UNIVERSITY PATENT AGENCY (CN)
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