Title:
MODE-MATCHING APPARATUS AND METHOD FOR MICROMACHINED INERTIAL SENSORS
Document Type and Number:
WIPO Patent Application WO/2010/135223
Kind Code:
A3
Abstract:
A mode matching servo for an inertial sensor having a resonator and an accelerometer provides a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than an accelerometer resonance mode frequency so as to induce acceleration signals from the accelerometer substantially at the test signal frequency when the modes are not matched. A feedback signal is provided in response to such induced signals to substantially nullify the signals.
Inventors:
GEEN JOHN A (US)
Application Number:
PCT/US2010/035071
Publication Date:
January 05, 2012
Filing Date:
May 17, 2010
Export Citation:
Assignee:
ANALOG DEVICES INC (US)
GEEN JOHN A (US)
GEEN JOHN A (US)
International Classes:
G01C19/56
Foreign References:
| FR2849183A1 | 2004-06-25 | |||
| US6654424B1 | 2003-11-25 | |||
| US20060021433A1 | 2006-02-02 |
Attorney, Agent or Firm:
SUNSTEIN, Bruce D. et al. (125 Summer StreetBoston, MA, US)
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