Title:
MODIFIED DUAL DIAPHRAGM PRESSURE SENSOR
Document Type and Number:
WIPO Patent Application WO2005066599
Kind Code:
A3
Abstract:
A device for sensing pressure including a chamber defïning part having a first diaphragm mounted in communication with the sealed chamber defining part, and a second diaphragm electrically insulated from the first, preferably by a spacer. The diaphragms are flexible and have a conductive surface. A sensor chamber is mounted on the ether side of the second diaphragm. It has an opening in communication with a sensing atmosphere. One of the diaphragms includes openings it its surface to permit fluid to flow through the openings and the other diaphragm is solid and responds to change in pressure in the sensor chamber to move away from or toward the one diaphragm. Electrical connections measure capacitance between the diaphragms as a function of the pressure in the sensor chamber.
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Inventors:
WANG TZU-YU (US)
CABUZ EUGEN I (US)
CABUZ EUGEN I (US)
Application Number:
PCT/US2004/042759
Publication Date:
October 06, 2005
Filing Date:
December 20, 2004
Export Citation:
Assignee:
HONEYWELL INT INC (US)
WANG TZU-YU (US)
CABUZ EUGEN I (US)
WANG TZU-YU (US)
CABUZ EUGEN I (US)
International Classes:
G01L7/08; G01L9/00; (IPC1-7): G01L7/08; G01L9/12
Foreign References:
| US20030005774A1 | 2003-01-09 | |||
| US20020103412A1 | 2002-08-01 | |||
| US6179586B1 | 2001-01-30 | |||
| US5277068A | 1994-01-11 | |||
| US4754365A | 1988-06-28 |
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