Title:
MODIFIED OBLIQUE INCIDENT ANGLE DEPOSITION APPARATUS, METHOD FOR MANUFACTURING NON-REFLECTIVE OPTICAL THIN FILM USING THE SAME, AND NON-REFLECTIVE OPTICAL THIN FILM
Document Type and Number:
WIPO Patent Application WO/2010/134677
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a non-reflective optical thin film. According to the present invention, the method comprises: a first step of mounting a glass substrate on a supporting plate which is connected to a supporter formed within a chamber; a second step of vertically moving the supporter so that the glass substrate may be parallel to the ground; a third step of depositing a first reflective index layer on the glass substrate by using a deposition material; a fourth step of moving the supporter so that the glass substrate deposited with the first refractive index layer may have a certain incident angle; a fifth step of depositing on the glass substrate a second refractive index layer having a smaller refractive index than the first refractive index layer by using a porosity-increasing filter which is located in the lower region of the glass substrate and increases the porosity of the deposition material moving toward the glass substrate; a sixth step of removing the porosity-increasing filter from the lower region of the glass substrate, and moving the supporter vertically so that the glass substrate deposited with the first and second refractive index layers may be parallel to the ground; and a seventh step of repeating the third to fifth steps one time, wherein the first and second refractive index layers may be deposited with the same deposition material.
Inventors:
HWANGBO CHANG KWON (KR)
PARK YONG JUN (KR)
PARK YONG JUN (KR)
Application Number:
PCT/KR2009/007276
Publication Date:
November 25, 2010
Filing Date:
December 07, 2009
Export Citation:
Assignee:
INHA IND PARTNERSHIP INST (KR)
HWANGBO CHANG KWON (KR)
PARK YONG JUN (KR)
HWANGBO CHANG KWON (KR)
PARK YONG JUN (KR)
International Classes:
G02B1/11; C23C14/22; G02B1/10
Foreign References:
| KR20070016570A | 2007-02-08 |
Other References:
DAVID J. POXSON ET AL.: "Broadband omnidirectional antireflection coatings optimized by genetic algorithm", OPTICS LETTERS, vol. 34, no. 6, 15 March 2009 (2009-03-15), pages 728 - 730, XP001522393, DOI: doi:10.1364/OL.34.000728
SCOTT R. KENNEDY ET AL.: "Porous broadband antireflection coating by glancing angle deposition", APPLIED OPTICS, vol. 42, no. 22, 1 August 2003 (2003-08-01), pages 4573 - 4579, XP002616697, DOI: doi:10.1364/AO.42.004573
SCOTT R. KENNEDY ET AL.: "Porous broadband antireflection coating by glancing angle deposition", APPLIED OPTICS, vol. 42, no. 22, 1 August 2003 (2003-08-01), pages 4573 - 4579, XP002616697, DOI: doi:10.1364/AO.42.004573
Attorney, Agent or Firm:
LEE, WON-HEE (KR)
이원희 (KR)
이원희 (KR)
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Claims: