Title:
MODULE FOR FEEDING DRYING GAS AND FOR LEADING AWAY GAS LADEN WITH VAPOR AND DEVICE FOR DRYING A SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2015/107154
Kind Code:
A3
Abstract:
The invention relates to a module (M) for feeding drying gas and for leading away moist gas laden with vapor, comprising a gas feed chamber (1) having at least one connecting piece (10) for feeding drying gas and having a gas distribution plate (8) having a plurality of openings for discharging the drying gas, and comprising a gas removal chamber (2) having at least one second connecting piece (11) for leading away the moist gas and having at least one gas intake slot (9), wherein the gas removal chamber (2) surrounds the gas feed chamber (1) at least in some sections, such that the gas feed chamber (1) and the gas removal chamber (2) form a common bottom (B) of a housing (G) of the module (M), which bottom comprises the gas distribution plate (8) and an opening (O) of the gas intake slot (9).
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Inventors:
DURST FRANZ (DE)
SOLTANZADEH HAMED (DE)
ZHENG GONGYUAN (DE)
BRUNNER THOMAS (DE)
HORMESS VOLKER (DE)
SOLTANZADEH HAMED (DE)
ZHENG GONGYUAN (DE)
BRUNNER THOMAS (DE)
HORMESS VOLKER (DE)
Application Number:
PCT/EP2015/050785
Publication Date:
September 24, 2015
Filing Date:
January 16, 2015
Export Citation:
Assignee:
FMP TECHNOLOGY GMBH FLUID MEASUREMENTS & PROJECTS (DE)
International Classes:
F26B3/28; F26B3/30; F26B13/10; F26B21/00
Domestic Patent References:
| WO2013045026A1 | 2013-04-04 |
Foreign References:
| US4125948A | 1978-11-21 | |||
| US3324570A | 1967-06-13 | |||
| US3012335A | 1961-12-12 | |||
| US3462851A | 1969-08-26 | |||
| US20120318454A1 | 2012-12-20 | |||
| DE488750C | 1930-01-07 | |||
| DE1604851B1 | 1970-12-23 |
Attorney, Agent or Firm:
GASSNER, Wolfgang et al. (Erlangen, DE)
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