Title:
MODULE FOR GENERATING HIGH-DENSITY PLASMA IN DIRECT TYPE
Document Type and Number:
WIPO Patent Application WO/2023/234751
Kind Code:
A1
Abstract:
The present invention provides a plasma generation module comprising: multiple needle-shaped discharge electrodes disposed in multiple cells arranged in the XY plane such that the peaks thereof are oriented in the Z-axis direction at the centers of the cells; ground electrodes formed on perimeters of the cells in one-to-one correspondence with the peaks in the XY plane at the same height as the peaks; a guide block on which the ground electrodes are seated and which has grooves into which the multiple needle-shaped discharge electrodes are inserted; and a first terminal electrically connected to multiple needle-shaped discharge electrodes, and a second terminal electrically connected to the ground electrodes. According to the present invention, it is possible to generate plasma in a multiphasic and uniform manner by using the discharge electrodes and the ground electrodes included in the multiple cells.
Inventors:
LEE SANG DAE (KR)
JUNG JAE HOON (KR)
JUNG JAE HOON (KR)
Application Number:
PCT/KR2023/007646
Publication Date:
December 07, 2023
Filing Date:
June 02, 2023
Export Citation:
Assignee:
TOUMAI CO LTD (KR)
International Classes:
H05H1/24; H01T19/04; H01T23/00
Foreign References:
| JP2011115569A | 2011-06-16 | |||
| KR101065361B1 | 2011-09-16 | |||
| JP2017123990A | 2017-07-20 | |||
| KR101738079B1 | 2017-05-22 | |||
| KR20160101407A | 2016-08-25 |
Attorney, Agent or Firm:
YOON, Jae Seung (KR)
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