Title:
MOISTURE AND HYDROGEN-ABSORBING GETTER AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/191857
Kind Code:
A1
Abstract:
Provided is a moisture and hydrogen-absorbing getter. The moisture and hydrogen-absorbing getter may comprise: a silicon substrate having a concave portion and a convex portion; a plurality of holes formed on and extending downward from the silicon substrate having the concave portion and the convex portion; a moisture-absorbing silicon oxide layer; a hydrogen-absorbing hydrogen absorption pattern; and passivation metal catalyst particles.
Inventors:
CHOA YONGHO (KR)
EOM NUSIA (KR)
LIM HYORYOUNG (KR)
EOM NUSIA (KR)
LIM HYORYOUNG (KR)
Application Number:
PCT/KR2016/004745
Publication Date:
November 09, 2017
Filing Date:
May 04, 2016
Export Citation:
Assignee:
INDUSTRY-UNIV COOPERATION FOUNDATION HANYANG UNIV ERICA CAMPUS (KR)
International Classes:
H01J7/18; B01J20/10; B01J20/28; H01L23/26
Domestic Patent References:
| WO2015147389A1 | 2015-10-01 | |||
| WO2013027946A1 | 2013-02-28 |
Foreign References:
| US6428612B1 | 2002-08-06 | |||
| KR20100115704A | 2010-10-28 |
Attorney, Agent or Firm:
CHOI, Naeyoon (KR)
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