Title:
MOLD FABRICATION METHOD AND PROJECTION OPTICAL SYSTEM REFLECTION MIRROR
Document Type and Number:
WIPO Patent Application WO/2008/062655
Kind Code:
A1
Abstract:
There are provided a method for fabricating a mold suitable for forming, for example, a
reflection mirror for a projection optical system and a projection optical system
reflection mirror fabricated by the method. The method comprises a first step
of cutting or grinding a material (MM) of the mold to trim the shape of a transfer optical
surface and a second step of irradiating the transfer optical surface with an
electron beam to perform a smoothing process. The electron beam irradiation makes
it possible to erase a tool mark and the like on the material (MM) of the mold in the
first step, so that the surface can be smoothed while maintaining the shape of
the transfer optical surface.
Inventors:
MATSUMOTO YASUHIRO (JP)
Application Number:
PCT/JP2007/071483
Publication Date:
May 29, 2008
Filing Date:
November 05, 2007
Export Citation:
Assignee:
KONICA MINOLTA OPTO INC (JP)
MATSUMOTO YASUHIRO (JP)
MATSUMOTO YASUHIRO (JP)
International Classes:
B29C33/38; G02B5/08; B29L11/00
Domestic Patent References:
| WO2006033336A1 | 2006-03-30 |
Foreign References:
| JP2006308830A | 2006-11-09 | |||
| JP2006250858A | 2006-09-21 | |||
| JP2000263391A | 2000-09-26 | |||
| JP2006194764A | 2006-07-27 | |||
| JP2006035263A | 2006-02-09 |
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