Title:
MONITORING DEVICE AND MONITORING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/184485
Kind Code:
A1
Abstract:
A monitoring device according to an embodiment includes a detecting unit provided with: an image transmitting element that has an incident surface that can receive light from a substrate on which a minute object is placed, and an emission surface for emitting light incident from the incident surface, the image transmitting element transmitting two-dimensional image information about the minute object to a semiconductor light sensor; and the semiconductor light sensor that receives the light from the emission surface.
Inventors:
IMAI KAITA (JP)
KOUSAI SHOUHEI (JP)
NISHIGAKI MICHIHIKO (JP)
KOUSAI SHOUHEI (JP)
NISHIGAKI MICHIHIKO (JP)
Application Number:
PCT/JP2020/009864
Publication Date:
September 17, 2020
Filing Date:
March 06, 2020
Export Citation:
Assignee:
TOSHIBA KK (JP)
International Classes:
G02B21/36
Domestic Patent References:
WO2018062215A1 | 2018-04-05 |
Foreign References:
JP2014515179A | 2014-06-26 | |||
JP2015004770A | 2015-01-08 | |||
JP2017191180A | 2017-10-19 | |||
JP2002286643A | 2002-10-03 | |||
JPH04316478A | 1992-11-06 |
Other References:
See also references of EP 3940443A4
Attorney, Agent or Firm:
S & S INTERNATIONAL PPC (JP)
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