Title:
MONOCHROMATOR AND CHARGED PARTICLE BEAM APPARATUS HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2017/164439
Kind Code:
A1
Abstract:
The present invention relates to a charged particle beam apparatus wherein cylindrical electrostatic lenses for deflecting the path of a charged particle beam are symmetrically disposed and an energy selection aperture is interposed therebetween, whereby it is possible to select a charged particle beam that is in the central energy range. The apparatus has an integrated structure in which a monochromator center electrode and a plurality of electrodes arranged in portions at the front and rear of the center electrode are fixed to each other through insulation. Therefore, a mechanism for adjusting an offset with respect to an optical axis is advantageously simplified as compared to when lenses are separately provided in the front and rear portions respectively, and a secondary aberration is compensated at a light exit surface by the symmetry of an optical system.
More Like This:
| JPS6161354 | LIGHT MODULATOR |
| JP2000119648 | COLOR DISPLAY INSTRUMENT |
Inventors:
OGAWA TAKASHI (KR)
KIM JU HWANG (KR)
PARK IN YONG (KR)
KIM JU HWANG (KR)
PARK IN YONG (KR)
Application Number:
PCT/KR2016/002954
Publication Date:
September 28, 2017
Filing Date:
March 24, 2016
Export Citation:
Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
H01J31/24; H01J29/62; H01J29/70
Foreign References:
| KR20150146079A | 2015-12-31 | |||
| JP2016039118A | 2016-03-22 | |||
| JP2013196929A | 2013-09-30 | |||
| JP2000314708A | 2000-11-14 | |||
| US20120217391A1 | 2012-08-30 |
Attorney, Agent or Firm:
MOON, Hwan-Goo (KR)
Download PDF: